Title:
PRODUCTION METHOD FOR MAGNETIC FIELD DETECTION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2024/085097
Kind Code:
A1
Abstract:
[Problem] When a magnetic field detection element is formed on an Si substrate, reducing the coil pitch inside an inverted-trapezoidal groove makes it easier for the step at an upper part of the groove or the edge of a bottom surface of the groove to cause disconnection and makes it difficult to form an upper coil and a lower coil that constitute a detection coil. [Solution] The present invention involves applying a negative resist resin coating film to a groove part and performing a curing heat treatment on the negative resist resin coating film to give a groove bottom part an R shape and thereby prevent disconnection of a lower coil. The present invention also involves applying a positive resist resin coating film to the step between an upper part of the groove and a magnetic wire and performing a curing heat treatment on the positive resist resin coating film to form a smoother shape and thereby prevent disconnection of an upper coil.
Inventors:
KUDO KAZUE (JP)
TANABE JUNNICHI (JP)
HONKURA YOSHINOBU (JP)
HONKURA SHINPEI (JP)
TANABE JUNNICHI (JP)
HONKURA YOSHINOBU (JP)
HONKURA SHINPEI (JP)
Application Number:
PCT/JP2023/037312
Publication Date:
April 25, 2024
Filing Date:
October 16, 2023
Export Citation:
Assignee:
MAGNEDESIGN CORP (JP)
International Classes:
G01R33/02; H01L29/82; H10N50/10
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