Title:
NON-CONTACT SUCTION-TYPE WAFER SORTING APPARATUS, UNLOADING SORTING DEVICE, AND SORTING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/216738
Kind Code:
A1
Abstract:
A non-contact suction-type wafer sorting apparatus (1000), comprising a suction sorting main module (100), a first suction branch line module (200), a second suction branch line module (300), a first connecting piece (400), a second connecting piece (500), a third connecting piece (600) and a controller, wherein the suction sorting main module (100), the first suction branch line module (200) and the second suction branch line module (300) are all integrated with a suction module and a belt driving module, and suction bottom faces of the suction modules of the suction sorting main module (100), the first suction branch line module (200) and the second suction branch line module (300) are arranged to be higher than bottom faces of belts of the belt driving modules, such that a silicon wafer is sucked and transmitted to a corresponding fill position in a non-contact manner. Compared with jacking material sorting, the process flow is reduced, and the operation efficiency and the productivity are improved. Further disclosed are an unloading sorting device (10000) comprising the non-contact suction-type wafer sorting apparatus, and a sorting system.
Inventors:
XIONG YONG (CN)
GU YE (CN)
ZHUANG ZAICHENG (CN)
WU YIHUI (CN)
CAO KUIKANG (CN)
XUE FENG (CN)
GU YE (CN)
ZHUANG ZAICHENG (CN)
WU YIHUI (CN)
CAO KUIKANG (CN)
XUE FENG (CN)
Application Number:
PCT/CN2023/083870
Publication Date:
November 16, 2023
Filing Date:
March 24, 2023
Export Citation:
Assignee:
SUZHOU TZTEK TECH CO LTD (CN)
International Classes:
B07C5/36
Foreign References:
| CN114871153A | 2022-08-09 | |||
| CN110540043A | 2019-12-06 | |||
| CN215430337U | 2022-01-07 | |||
| CN111482374A | 2020-08-04 | |||
| CN212310119U | 2021-01-08 | |||
| CN111468425A | 2020-07-31 | |||
| JPH04121334A | 1992-04-22 | |||
| JPH07323953A | 1995-12-12 |
Attorney, Agent or Firm:
BEIJING TREENIE INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (CN)
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