Title:
INFORMATION PROCESSING METHOD, COMPUTER PROGRAM, AND INFORMATION PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/090428
Kind Code:
A1
Abstract:
Provided are an information processing method, a computer program, and an information processing device that can be expected to effectively utilize data obtained from a substrate processing device. With an information processing method according to the present embodiment, an information processing device: acquires time series observation data from observing the state of a substrate processing device; and calculates, through dynamic mode analysis based on the acquired time series observation data, a parameter of a model that predicts second observation information relating to observation data at a second time point which is later than a first time point, on the basis of first observation information relating to observation data at the first time point.
Inventors:
ANZAKI RYOJI (JP)
SANO KEI (US)
SANO KEI (US)
Application Number:
PCT/JP2023/038325
Publication Date:
May 02, 2024
Filing Date:
October 24, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G05B23/02; H01L21/02
Domestic Patent References:
| WO2022004419A1 | 2022-01-06 | |||
| WO2021154747A1 | 2021-08-05 |
Foreign References:
| JP2022070386A | 2022-05-13 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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