Title:
DUAL-DIAPHRAGM MEMS MICROPHONE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/216686
Kind Code:
A1
Abstract:
The present application discloses a dual-diaphragm MEMS microphone and a manufacturing method therefor. The dual-diaphragm MEMS microphone comprises: a back plate unit, a first diaphragm, a second diaphragm, and multiple connection units. The back plate unit is insulated and is supported between the first diaphragm and the second diaphragm; the back plate unit is provided with multiple through holes; each connection unit passes through one through hole; the multiple through holes and the multiple connection units are arranged in a one-to-one correspondence manner; the multiple through holes and the multiple connection units form multiple first annular holes; each connection unit comprises multiple connection columns, a connection block, a connection plate, and an upright column; one end of each connection column is connected to the side of the first diaphragm facing the second diaphragm; one end of the connection block is connected to the side of the second diaphragm facing the first diaphragm; the connection block is provided with an accommodating groove, and the opening of the accommodating groove faces the first diaphragm; the connection plate is configured to connect the connection block and the multiple connection columns, and the accommodating groove and the connection plate form an accommodating cavity; and the upright column is filled in the accommodating cavity.
Inventors:
MIAO JIANMIN (CN)
Application Number:
PCT/CN2023/079374
Publication Date:
November 16, 2023
Filing Date:
March 02, 2023
Export Citation:
Assignee:
MG MICROELECTRONICS CO LTD (CN)
International Classes:
H04R19/04
Domestic Patent References:
| WO2022007010A1 | 2022-01-13 |
Foreign References:
| CN114598979A | 2022-06-07 | |||
| CN110012409A | 2019-07-12 | |||
| CN104113810A | 2014-10-22 | |||
| CN107835477A | 2018-03-23 | |||
| CN113691916A | 2021-11-23 | |||
| US10999684B1 | 2021-05-04 |
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
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