Title:
CONVEYING DEVICE FOR WAFER CASSETTES
Document Type and Number:
WIPO Patent Application WO/2024/055348
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application is a conveying device for wafer cassettes. The conveying device comprises a rack and a conveying mechanism, wherein the conveying mechanism comprises two conveying units, which are arranged spaced apart in a first direction of the rack; the two conveying units perform conveying in opposite directions; each conveying unit comprises a linear module, which extends in a second direction, and a bearing module connected to the linear module; the linear module is used for driving the bearing module to move in the second direction; the bearing module comprises a first driving member and a bearing member connected to the first driving member; and the first driving member is used for driving the bearing member to rotate, and an output shaft of the first driving member is arranged in the first direction, the first direction and the second direction being configured to intersect with each other.
Inventors:
JIANG XIAOEN (CN)
ZHANG NINGNA (CN)
WU TING (CN)
ZHU RONG (CN)
CHEN DINGCAO (CN)
ZHANG NINGNA (CN)
WU TING (CN)
ZHU RONG (CN)
CHEN DINGCAO (CN)
Application Number:
PCT/CN2022/120668
Publication Date:
March 21, 2024
Filing Date:
September 22, 2022
Export Citation:
Assignee:
TAIWAN SEMICONDUCTOR MFG CO LTD (CN)
TSMC CHINA COMPANY LTD (CN)
TSMC CHINA COMPANY LTD (CN)
International Classes:
H01L21/677; B65G35/00; B65G47/22; B65G47/90
Foreign References:
| US20090067957A1 | 2009-03-12 | |||
| CN106384724A | 2017-02-08 | |||
| GB202118979D0 | 2022-02-09 | |||
| US20050095087A1 | 2005-05-05 | |||
| TW202006859A | 2020-02-01 | |||
| JPH07106395A | 1995-04-21 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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