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WO/2021/246254A1 |
The opening edge surface (45a) of an emitter support female screw hole (45) provided in an emitter support (4) extends in the radial direction of the emitter support female screw hole (45). In an emitter support operation hole (32) provi...
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WO/2021/246253A1 |
A vacuum container (11) is configured so that: an opening (21) on one side and an opening (22) on another side in the longitudinal direction of a cylindrical insulating body (2) are sealed with an emitter unit (30) and a target unit (70)...
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WO/2021/247212A1 |
An EUV light source including a vacuum chamber, a droplets injector operatively connected to the vacuum chamber for directing the droplets into the vacuum chamber, droplets produced by the droplets injector wherein the droplets have one ...
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WO/2021/241227A1 |
The present invention is a high voltage generator comprising a Cockcroft-Walton circuit that applies a potential difference to a load (2) upon receiving a supply of AC power from an AC power source (1), wherein three or more substrates a...
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WO/2021/239382A1 |
Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam thro...
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WO/2021/239357A1 |
An apparatus includes: a vessel comprising an interior space; a material supply system configured to provide targets comprising target material along a path in the interior space; a detection system configured to detect scattered light p...
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WO/2021/233645A1 |
A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the ...
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WO/2021/229902A1 |
This extreme ultraviolet light source device comprises: a cathode; an anode; a power supply device; a first support structure that is metal and that supports the cathode; and a second support structure that is metal and that supports the...
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WO/2021/228517A1 |
An EUV radiation source comprising a fuel emitter configured to produce fuel droplets; a laser system configured to illuminate a fuel droplet at a plasma formation region, the laser system comprising: a first laser configured to produce ...
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WO/2021/223953A1 |
An apparatus includes: a mechanically insulating device including a flexible bellows (315) extending between first and second flanges (325, 330) and defining a bellows passageway that extends along an axial direction between openings of ...
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WO/2021/225948A1 |
A dose for a coronary calcium scoring (CCS) computed tomography (CT) scan (e.g., a volume CT dose index (CTDIvol)) can be determined for lower tube voltages (e.g., a lower peak kilovoltage (kVp)) based on a given reference tube voltage. ...
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WO/2021/216967A1 |
X-ray imaging systems and methods comprising, at least, an x-ray source, an x-ray detector, and a collimator assembly. The collimator assembly comprising a computer, a display, a camera, an x-ray source to object (patient) measuring devi...
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WO/2021/210239A1 |
This energy beam irradiation device comprises: an electron discharge unit having an elongated electron discharge part; a housing having a window part that emits an energy beam based on electrons discharged from the electron discharge par...
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WO/2021/211478A1 |
A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, an...
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WO/2021/210238A1 |
This electron beam generator comprises: an electron release unit that extends along a desired axis and releases electrons; a support unit that is electrically connected to a power feed device that feeds power to the electron release unit...
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WO/2021/210237A1 |
This electron beam generation source comprises: an electron discharge unit that extends along a desired axis and emits electrons; a movable unit that is linked to one end of the electron discharge unit; a support unit that supports the m...
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WO/2021/209214A1 |
Disclosed is a source for and method of generating extreme ultraviolet radiation in which a flow characteristic of a gas introduced into the source or exhausted from the source is varied at least partially in accordance with a prevailing...
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WO/2021/204482A1 |
A gas mixture control system for an optical amplifier system includes: an input configured to be fluidly connected to the optical amplifier system to receive a gas mixture; an output configured to be fluidly connected to the optical ampl...
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WO/2021/207316A1 |
A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interi...
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WO/2021/202740A1 |
An imaging device includes a rotatable gantry having opposing sides, wherein the gantry is rotatable about an axis of rotation, an x-ray source mounted to the gantry, an x-ray detector mounted to the gantry opposite the x-ray source, and...
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WO/2021/195586A1 |
Systems, methods, and computer-readable media for enabling ultraviolet radiation treatments are provided.
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WO/2021/180444A1 |
A control module for controlling a laser beam comprising an optical modulator, wherein the optical modulator being configured to modulate a laser beam, a controller configured to control the optical modulator, the controller being config...
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WO/2021/182887A2 |
An extreme-ultraviolet light source device comprises: a discharge chamber of which the inside is maintained in a vacuum; an electron beam-emitting unit which is located inside the discharge chamber and produces electron beams; and a meta...
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WO/2021/168732A1 |
A radiation detector(100) and method of operating the radiation detector(100) is provided. The method comprising: for i=1, …, N, during a transfer period (i), electrically connecting pixel (1, i) of pixels (1, j), j=1, …, N of the ra...
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WO/2021/165078A1 |
The invention relates to a method for operating an optical assembly (1) for EUV lithography, having the steps of: generating EUV radiation (5) at an operating wavelength (λB) in the EUV wavelength range using an EUV radiation source (2)...
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WO/2021/154851A1 |
A method, a system, a device, and a computer program produce for photon detection is disclosed. The method includes receiving, by a plurality of anodes, a photon via one or more of the plurality of anodes; measuring respective voltages o...
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WO/2021/154519A1 |
An X-ray imaging system using multiple pulsed X-ray sources in motion to perform high efficient and ultrafast 3D radiography is presented. There are multiple pulsed X-ray sources mounted on a structure in motion to form an array of sourc...
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WO/2021/148224A1 |
An apparatus comprising: a radiation receiving apparatus provided with an opening operable to receive radiation from a radiation source through the opening; wherein the radiation receiving apparatus comprises a deflection apparatus arran...
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WO/2021/148873A1 |
An X-ray laser has a target anode of a crystalline material that emits X-ray radiation in response to excitation and that is located on a thermally conductive substrate. An X-ray source provides an input X-ray beam that illuminates a pre...
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WO/2021/142480A1 |
An X-ray optical system incorporates a refractometer, interferometer, spectrometer, diffractometer or imaging device for analyzing a sample. The X-ray optical system is configured with a monochromator which is fabricated from low atomic ...
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WO/2021/113323A9 |
An X-ray generation system is configured to generate an X-ray beam configured to be delivered to a patient undergoing radiation therapy. The X-ray generation system includes a linear accelerator system configured to generate an electron ...
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WO/2021/131886A1 |
This X-ray tube packing device packs an X-ray tube. The X-ray tube packing device is provided with a mounting table, an X-ray tube attachment part to which the X ray tube is attached, and a rotation mechanism which is provided on the mou...
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WO/2021/122341A1 |
A metrology system includes a light beam metrology apparatus configured to sense one or more aspects of an amplified light beam and to make adjustments to the amplified light beam based on the sensed one or more aspects; a target metrolo...
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WO/2021/121985A1 |
A method includes ejecting initial droplets of a material using a nozzle. The method includes applying a pressure on the nozzle using an electromechanical element. The method includes controlling the applied pressure on the nozzle using ...
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WO/2021/122369A1 |
Disclosed is a medical instrument (100, 200, 300, 400, 500, 700, 900) comprising an X-ray power supply (102, 102'). The X-ray power supply is configured to provide an output voltage that repeatedly switch between a first voltage and a se...
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WO/2021/121852A1 |
An apparatus for an extreme ultraviolet (EUV) light source includes a body. The body includes a first structure (246) including a first wall and a second structure (248) including a second wall permanently joined to the first wall. An in...
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WO/2021/121837A1 |
An apparatus for monitoring a stream of droplets of target material for generating a radiation beam in a radiation source, wherein the apparatus comprises: a target material emitter for creating the stream of droplets of target material,...
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WO/2021/121814A1 |
A vessel (16) for an EUV radiation source, the vessel comprising a first opening (30) for accessing an interior (32) of the vessel, a first access member (34) configured to allow or prevent access to the interior of the vessel through th...
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WO/2021/110494A1 |
An X-ray imaging system (XI) configured for phase contrast and/or dark-field imaging. The system comprises an X-ray source (XS) operable to cause X-radiation to emanate from a focal spot (SF) of the source (XS) and an X-ray sensitive det...
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WO/2021/104794A1 |
An extreme ultraviolet (EUV) light source includes: a vessel configured to receive target material that emits EUV light when in a plasma state; a delivery system configured to deliver free radicals (135) to an interior of the vessel; an ...
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WO/2021/099202A1 |
A method for characterizing an electron beam in a liquid metal jet X-ray source is disclosed. The method comprises providing said electron beam and directing said electron beam to an interaction region; providing an electron beam dump co...
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WO/2021/094806A1 |
This invention relates to a radiological imaging method comprising: 2 radiation sources with imaging directions orthogonal to each other, performing vertical scanning of a standing patient (20) along a vertical scanning fdirection (Z), w...
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WO/2021/094203A1 |
The present invention relates to a rotary anode X-ray source. In addition to a primary cathode of a rotary anode X-ray tube, an auxiliary cathode is provided in the rotary anode X-ray tube. Electrons from the auxiliary cathode are focuse...
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WO/2021/082385A1 |
A security inspection apparatus capable of adapting to a change in conveyance speed, and a control method for the same, pertaining to the field of security inspection. The apparatus comprises three portions, a base unit, a scanning unit,...
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WO/2021/082384A1 |
A self-adaptive security check apparatus based on conveying speed change, relating to the field of security check, and comprising three portions, i.e., a base unit, a scanning unit, and a speed measurement assembly. The base unit compris...
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WO/2021/083099A1 |
An extreme ultraviolet light source apparatus, comprising: an electron source (2), wherein the electron source (2) provides an electron beam; an injection section (3), wherein the injection section (3) accelerates the electron beam to fo...
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WO/2021/086799A1 |
Methods and systems for generating X-ray illumination from a laser produced plasma (LPP) employing a liquid sheet jet target are presented herein. A highly focused, short duration laser pulse is directed to a liquid sheet jet target. The...
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WO/2021/078646A1 |
Method for assessing a position of a patient with respect to an automatic exposure control chamber, AEC chamber (11, 12), for a medical exam, wherein a patient is positioned between an X-ray source and the AEC chamber (11, 12); comprisin...
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WO/2021/074043A1 |
A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and ap...
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WO/2021/073833A1 |
There is provided a container arranged to contain a waste product of a laser-produced plasma radiation source. The container comprises: a first portion which defines a chamber; and a second portion which at least partially defines an ent...
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