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WO/2018/177768A1 |
The invention describes a method and a device for creating a phase modulated ultrashort laser pulse (12), comprising the following steps: - an initial ultrashort laser pulse (1) is split into a first laser pulse (3) and a second laser pu...
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WO/2018/172012A1 |
A lithographic system (100) comprises an EUV radiation source for generating EUV radiation; and a lithographic scanning apparatus that uses the EUV radiation for illuminating a pattern to image the pattern onto a substrate; and control s...
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WO/2018/175023A1 |
A system for an EUV light source includes a metrology light source configured to emit a metrology light beam; and an optical beam combiner positioned to receive the metrology light beam and at least one other light beam and to direct the...
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WO/2018/163380A1 |
This droplet discharge device may be provided with: a droplet discharge unit that discharges at intervals, through an opening of a nozzle connected to a tank, a droplet of a target material stored in the tank; a speed sensor that measure...
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WO/2018/162437A1 |
The invention relates to a cooling device for x-ray tubes in x-ray generators, comprising a housing with a central receiving device for receiving an x-ray tube with an inlet opening for supplying a gaseous coolant, an outlet opening for ...
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WO/2018/157182A1 |
The invention relates to a scanning object carrier (1), which is provided for installation on a scanner rocker (2) of a scanning device (3) for scanning at least one, in particular dental, object (20), wherein the scanning object carrier...
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WO/2018/158053A1 |
A radiation source arrangement causes interaction between pump radiation (340) and a gaseous medium (406) to generate EUV or soft x-ray radiation by higher harmonic generation (HHG). The operating condition of the radiation source arrang...
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WO/2018/160730A1 |
A new and improved anatomical imaging system which includes a new and improved movement system, wherein the movement system comprises an omnidirectional powered drive unit and wherein themovement system can substantially eliminate latera...
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WO/2018/150530A1 |
This extreme ultraviolet light generating device is provided with: (A) a chamber; (B) an optical unit; (C) a chamber reference member that is provided with a housing chamber for housing the optical unit; (D) a height positioning mechanis...
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WO/2018/138918A1 |
The extreme UV light generation device according to one aspect of the present disclosure comprises a chamber; a target supply unit which supplies droplets of a target substance into a plasma generation region inside the chamber; a first ...
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WO/2018/136683A1 |
An ignition facilitated electrodeless sealed high intensity illumination device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The cham...
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WO/2018/134347A1 |
An X-ray source arrangement (10) for generating X-ray radiation (102), a method for operating the X-ray source arrangement (10), and an X-ray imaging apparatus (100) are provided. The X-ray source arrangement (10) comprises an X-ray tube...
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WO/2018/134861A1 |
A Thomson scattering measurement system according to the present disclosure includes: a transfer optical system that is provided on the optical path of a group of slit light beams extracted through a slit array, and transfers the group o...
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WO/2018/131146A1 |
This extreme ultraviolet light generation system is provided with: a target supply unit; a prepulse laser that outputs prepulse laser light; a main pulse laser that outputs main pulse laser light; a light collecting optical system that c...
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WO/2018/132284A1 |
A system can have an x-ray source that generates a series of individual x-ray pulses for multi-energy imaging. A first x-ray pulse can have a first energy level and a subsequent second x-ray pulse in the series can have a second energy l...
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WO/2018/131123A1 |
Provided is an extreme ultraviolet light generation system comprising: a target supplying unit that outputs a target toward a prescribed region; a drive laser that outputs drive laser light during a period in which a burst signal input f...
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WO/2018/127565A2 |
A radiation source including a chamber including a plasma formation region, a radiation collector arranged in the chamber, the radiation collector configured to collect radiation emitted at the plasma formation region and to direct the c...
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WO/2018/128740A1 |
A system for an extreme ultraviolet (EUV) light source includes a light-generation system configured to emit one or more light beams onto a beam path; one or more optical amplifiers, each of the one or more amplifiers including a gain me...
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WO/2018/112039A1 |
A diagnostic system for monitoring a status of a CT system includes at least one radiation detector configured to monitor a CT component and generate signals representing measurement data associated with the CT component. The system also...
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WO/2018/108468A1 |
An EUV radiation source (42, 300) is used for example in a lithographic apparatus or inspection apparatus. For generating EUV radiation (302), laser radiation (304) in a second waveband is directed to a target of liquid tin fuel (69) to ...
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WO/2018/104497A1 |
The invention relates to a system (1) for detecting image parameters during the exposure of films (2), especially radiographic films. The object of the invention is to provide a system which makes it possible to simply and rapidly obtain...
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WO/2018/092227A1 |
A carriage for replacing a target generation device comprises: A. a linear movement mechanism that holds a target generation device for outputting a target substance and moves the target generation device linearly in the output direction...
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WO/2018/093164A1 |
A digital light source device according to the disclosed present invention comprises: a hollow body unit which has a space therein; a source unit which emits electrons from inside the body unit; and an anode unit which generates X-rays o...
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WO/2018/091280A1 |
Device (12) comprising a multileaf collimator (1), said multileaf collimator comprising an array (2) of leaves (3) and slits (4), said array comprising an alternation of leaves and slits and extending in a longitudinal direction (5), sai...
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WO/2018/092174A1 |
This X-ray generator (100) has an X-ray tube (20), a drive circuit (40) driving the X-ray tube (20), a voltage generation circuit (30) generating the electron-acceleration voltage to be applied to the X-ray tube (20), and a control unit ...
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WO/2018/086870A1 |
A radiation system comprising a fuel emitter configured to provide fuel to a plasma formation region, an excitation device arranged to provide an excitation beam at the plasma formation region to convert at least a part of the fuel into ...
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WO/2018/085071A1 |
A method and apparatus tor control of a dose of extreme ultraviolet (EUV) radiation generated fay a laser produced plasma (LPP) EUV Sight source. Each laser pulse is modulated to be of a width that is determined to he sufficient to allow...
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WO/2018/083727A1 |
An extreme UV light generation device is provided with: a target supply unit that outputs a target toward a prescribed region; a laser system that outputs a first laser light irradiated on the target, a second laser light irradiated on t...
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WO/2018/078676A1 |
This X-ray generator comprises an X-ray tube, a drive circuit for driving the X-rays, a voltage generation circuit for generating an electron acceleration voltage to be applied to the X-ray tube, and a control unit communicating with the...
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WO/2018/079176A1 |
In an X-ray generating apparatus 101 in which an X-ray tube 102 is anode-grounded to a protruding portion 107c of a container 107, electrical discharge between the X-ray tube 102 and the container 107 is reduced. The container 107 includ...
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WO/2018/072834A1 |
The invention relates to computer implemented method for monitoring the functional state of a system (106) for the computer-tomographic examination of workpieces (104), wherein the computer-tomographic examination of a workpiece (104) co...
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WO/2018/072913A1 |
It is the objective of the present invention to provide a compact and cost effective light source with a small foot print that can host more than one insertion device. Exemplarily –but not limited to –a compact source for metrology a...
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WO/2018/069976A1 |
A target supply apparatus according to an aspect of the present invention is provided with: a nozzle through which a target is outputted; a plurality of vibrators including a first vibrator that vibrates the nozzle; a detection unit that...
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WO/2018/066135A1 |
This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside o...
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WO/2018/065828A1 |
The present invention relates to a Portable Molecular Quantum Dot Cellular Automata (QCA) X-Ray System (1) comprising of a QCA X-ray generator, a X-ray detector and a Q- ray image analyzer, more particularly, to propose a QCA X-ray gener...
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WO/2018/061212A1 |
[Problem] To prevent oxidation of molten tin in a chamber device that includes a chamber, and a target generation device for supplying tin, i.e., a target material, to a predetermined region in the chamber. [Solution] Disclosed is a cham...
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WO/2018/061660A1 |
A transformer (105a) is provided with: an iron core (201); a primary winding wire (211) to which an AC voltage is inputted; a secondary winding wire (212) from which an AC voltage is outputted, wherein a high DC voltage is applied to the...
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WO/2018/055744A1 |
The laser device (200) according to an aspect of the present disclosure is a laser device (200) provided with one or more amplification units (204) for amplifying laser light emitted from a laser oscillator (202), and an amplification co...
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WO/2018/057399A1 |
An optical source for an extreme ultraviolet (EUV) photolithography tool includes a light-generation system including a light-generation module; an optical amplifier including a gain medium associated with a gain band, the gain medium co...
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WO/2018/052799A1 |
A method is described for measuring a moving property of a current target as it travels along a trajectory toward a target space. The method includes: detecting a plurality of two- dimensional representations of light that are produced d...
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WO/2018/052909A1 |
A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an inter...
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WO/2018/042565A1 |
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provid...
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WO/2018/042627A1 |
A target generating device according to one aspect of the invention comprises a tank for housing a target substance, a heater disposed in the tank, a nozzle communicating with the interior of the tank, a lid part having a gas introductio...
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WO/2018/042563A1 |
This droplet collection device is provided with: a collecting container which is provided to an outer wall surface side of a wall of a chamber, and which is formed so as to communicate with the inside of the chamber via an opening provid...
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WO/2018/034020A1 |
This soft X-ray source is provided with: a laser device 36 which generates a plasma containing an element included in a target 32 by irradiating the target with a laser beam 60, and causes soft X-rays 62 to radiate from the plasma; and a...
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WO/2018/029863A1 |
This droplet detector (8) may comprise: an irradiation unit (41) for emitting pulsed light (DPL) at a predetermined period and irradiating a plurality of pulsed light (DPL) onto a droplet (DL) moving in a detection region on a trajectory...
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WO/2018/029759A1 |
An extreme ultraviolet light generation method according to one aspect of the present application, wherein a droplet is outputted to a first laser irradiation region that is a different region from a plasma generation region, the droplet...
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WO/2018/030122A1 |
An extreme ultraviolet light generation method according to one aspect of the present application, wherein a droplet is outputted to a first laser irradiation region that is a different region from a plasma generation region, the droplet...
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WO/2018/025560A1 |
Provided are a high-voltage generating device with which it is possible to improve the reliability of insulation in a DC generation circuit, and an x-ray high-voltage generator in which the high-voltage generating device is used. For thi...
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WO/2018/020257A1 |
In examples, it is disclosed an inspection system comprising: a secondary source of radiation configured to generate secondary electromagnetic radiation for inspection of a load in response to being irradiated by primary electromagnetic ...
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