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JP2010286248A |
To provide a polarization analyzer which can measure a state of polarization and the degree of polarization with high accuracy.The polarization analyzer 91 includes a non-polarized light source 11 which outputs non-polarized light, an op...
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JP2010271279A |
To provide a measuring apparatus and a measurement method capable of isolating a birefringence component, an error factor, and measuring the optical rotation of an object to be measured, with high accuracy.The Stokes parameters for a lig...
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JP4587690B2 |
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JP2010263021A |
To provide a polarization detection sensor that produces no offset and unbalance by s-wave and p-wave components of incident light. The polarization plane detection sensor includes a plurality of unit pixels provided with two photodiodes...
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JP4579423B2 |
The surface of a doped semiconductor wafer is heated locally by means of a pump beam whose intensity is modulated at a first frequency. The heated area is sampled by a probe beam whose intensity is modulated at a second frequency. After ...
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JP2010249627A |
To measure polarization characteristics of two optical systems respectively, by detecting illumination light passing through the two optical systems.A method for measuring the polarization characteristics of an illumination optical syste...
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JP4566401B2 |
A two-beam interferometer (1) splits an incident light in two optical paths, combines and outputs split lights together again. The two-beam interferometer (1) generates at least one or more combined light made from two beams each having ...
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JP2010530074A |
The present invention relates to a single-polarizer focused-beam ellipsometer. An ellipsometer according to the present invention includes a light source (210); a beam splitting part (220) for splitting a light generated in the light sou...
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JP4528314B2 |
A polarization direction measuring apparatus includes: a first polarizing plate having an unknown polarization direction about a reference axis; a sample whose polarization direction is to be measured; a rotatable sample holder on which ...
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JP4523143B2 |
To measure the concentration of an optically active substance in a solution without contacting the solution, the concentration measuring apparatus of the present invention comprises: a light source for outputting linearly polarized light...
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JP4514430B2 |
A polarization state generator (PSG) (4) has a set of liquid crystal (LC) elements (13) having an extraordinary axis for each element making an angle (theta 1,theta 1') respectively with respect to direction of polarization and retardati...
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JP2010525349A |
A method and apparatus for analysing the three-dimensional electromagnetic beam resulting from an interaction between a focused illuminating beam and a sample to be observed, by characterising the distribution of the state of polarisatio...
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JP4509459B2 |
A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one f...
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JP2010145332A |
To provide an optical characteristic measuring instrument free from any mechanical drive and capable of measuring optical characteristics of a measurement object at a high accuracy, and an optical characteristic measurement method and a ...
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JP2010139345A |
To provide a birefringence measurement apparatus for accurately calculating the birefringence quantity and a birefringence axial angle in a single measurement. The birefringence measurement apparatus for measuring the birefringence quant...
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JP2010133764A |
To quickly and precisely measure a wide range of average film thickness, shape, and physical characteristics of a sample for a polarization analyzer, a method of detecting abnormality by polarization analysis, a method of manufacturing a...
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JP2010122211A |
To provide a spin-polarised charge carrier device.The device includes a channel 15 for charge carriers composed of a non-ferromagnetic semiconductor material in which charge carriers exhibit spin-orbit coupling, a region 10 of a semicond...
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JP2010121935A |
To provide a polarized image picking-up apparatus which is small-sized and low-cost.The polarized image picking-up apparatus 10 includes a light source 16 for emitting light; a first polarizer 18, which is constituted statically in terms...
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JP2010117163A |
To provide a polarimeter which is improved in the accuracy of measurement of optical rotation, and a method for calibrating the polarimeter.This polarimeter is so constituted that linear polarized light transmitted through a sample solut...
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JP2010117164A |
To make measuring time short and uniform in regard to a polarizer which measures optical rotation of a sample.Linear polarized light which is transmitted through the sample in a sample cell (sample disposing means) 13, so as for the plan...
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JP4464561B2 |
Achromatic optics may be employed in spectroscopic measurement systems. The achromatic optics comprises a spherical mirror receiving a beam of radiation in a direction away from its axis and a pair of lenses: a positive lens and a negati...
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JP4455024B2 |
Disclosed is a birefringence measuring apparatus and method for measuring birefringence of a sample in a reduced time and in a simple manner. The birefringence measuring apparatus includes a light projecting unit for projecting approxima...
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JP2010071878A |
To achieve a sensitivity adjustment method, capable of measuring the polarization of measured light in the dynamic range of an imaging element, without increasing the cost and of enhancing the accuracy of polarization measurement.This se...
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JP4435298B2 |
A sample, in which a dielectric film having a dielectric constant equal to or larger than 50 (based on electrical measurement) is formed on a substrate, is measured by an ellipsometer while a model corresponding to the sample is formed b...
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JP4425979B2 |
Method and apparatus for testing of LCD cells is disclosed. An LCD cell under test (14, 30) may be mounted to translatable table (40) between polarization state generator (10) and polarization state analyzer (16). For each location on ce...
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JP4424583B2 |
Method for relative and absolute calibration of a complete polarimeter using a limited number of independent and inaccurate, known one-way polarizers, whereby only the polarization degree of all the one-way polarizers must be the same, w...
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JP4416547B2 |
An evaluation apparatus which evaluates a sample. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a...
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JP4416638B2 |
A method for determining a polarization state of light passed through the projection lens of a lithographic apparatus is described. Polarizing structures (102-108) are disposed on an object side of the projection lens of the lithographic...
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JP4408805B2 |
A support designed for observing between intersecting polarizers an object located in its vicinity in a medium (3) of index n0 with incident convergent incoherent illumination under an angle theta0 at a wavelength lambda. The support inc...
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JP4399126B2 |
The present invention provides a spectroscopic ellipsometer capable of measuring an infinitesimal area with a high degree of precision. The present invention provides a spectroscopic ellipsometer comprising an irradiating optical sys...
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JP4398735B2 |
An imaging spectrometer is disclosed that comprises imaging means for dividing a received image into two or more spatially separated images and means for detecting each spectral image, and is characterized in that the imaging means compr...
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JP2010002190A |
To provide an optical spectrum analyzer can measure the optical spectrum intensity and the polarization state of input light signal without conforming the polarization direction to the polarization axis of a polarizer by controlling the ...
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JP4392948B2 |
According to the present invention, it is adapted to calculate simultaneously an absolute molecular orientation with an effective second order nonlinear optical constant in an object to be measured without changing a measuring point. Fur...
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JP2009300363A |
To provide an instrument for measuring a ratio of a light signal to a noise, capable of regulating easily a polarization controller, and capable of measuring highly precisely and quickly an OSNR, in the measuring instrument for solving a...
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JP4383200B2 |
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JP2009288631A |
To provide a device capable of writing and reading of retardation with a simple constitution.The retardation writing and reading device includes a light source 1, a polarizer 2, a sample stand 8 and a light-receiving element 6, and furth...
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JP2009288161A |
To provide an optical measurement apparatus and an optical measurement method for calibrating the degree of polarization to a molecular weight, without having to use different samples that have a plurality of the molecular weights.In the...
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JP2009543092A |
A spectroscopic ellipsometer and a spectroscopic reflector / ellipsometer complex system are disclosed. The spectroscopic ellipsometer system portion continuously transforms into a beam of electromagnetic radiation, a polarizer element (...
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JP2009277928A |
To provide a polarization state measuring apparatus can measure a polarization state of a radiant beam heading for a mask more precisely, and to provide an exposure apparatus and a method for manufacturing of a device.The polarization st...
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JP2009541735A |
The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then r...
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JP4365698B2 |
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JP4362098B2 |
The present invention has for its object to provide an optical device whose size is made small. In order to achieve this, according to the present invention there is provided an optical device in which a clad and a core whose refractive ...
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JP2009257971A |
To provide a device and method for measuring optical signal-to-noise ratio that solve a problem of a conventional measuring method wherein linear polarization orthogonal to the polarization axis of a polarizer is required to be input, wh...
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JP4358982B2 |
The present invention provides a spectral ellipsometer with which it is possible to easily focus all optical axes of multiwavelengths onto one spot by means of a remarkably simple and rational improved technique. The present inventio...
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JP4343743B2 |
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JP2009229279A |
To accurately surface-measure the birefringence of a fine area of a film having a fine structure.Light from a light source 11 is received by a CCD camera 24 via a collimator 15, a first linear polarizer 16, a first /4 wavelength plate 17...
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JP4336676B2 |
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JP2009210457A |
To stabilize measurements, by eliminating the influence due to change in the state of bending of an optical fiber on a measurement value, in a spectropolarimetric measuring device for receiving light from a sample incident via the optica...
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JP2009193014A |
To provide a polarizer which can be inexpensively manufactured and includes a patterning retardation layer and a patterning polarizing layer.The elliptical polarizer includes the patterning polarizing layer including two or more regions ...
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JP2009186255A |
To provide a polarization measuring device enabling manufacture of a device capable of polarization analysis in a wide wavelength area with a simple constitution.This polarization measuring device including a phase shifter array, an anal...
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