Title:
Z-AXIS LIFTING MECHANISM CAPABLE OF BALANCING STRESSED STATE
Document Type and Number:
WIPO Patent Application WO/2013/135052
Kind Code:
A1
Abstract:
Disclosed is a Z-axis lifting mechanism capable of balancing a stressed state, which relates to the field of manufacturing semiconductor silicon wafer transport robots, to solve the problems of poor stressed state in structures and ball guide rails having relatively large microscopic deformation in existing Z-axis driven lifting mechanisms. An upper mounting cover is arranged as directly opposed to a lower mounting base; a Z-axis driving device assembly is connected to the lower mounting base; a pre-tensioning wheel support encases the Z-axis driving device assembly; the pre-tensioning wheel support is connected to the lower mounting base; three screw drive mechanisms are uniformly distributed in the same circle between the upper mounting cover and the lower mounting base. A central end of a synchronous toothed drive belt encases a synchrodrive driving gear; three outer side ends of the synchronous toothed drive belt encase three synchrodrive driven gears, respectively. Three ball nuts are connected by threads to the three driving screws. A lower deep groove ball bearing is mounted in a lower bearing mounting hole in the lower mounting base, and an upper deep groove ball bearing is mounted in an upper bearing mounting hole. The present invention is for use on a silicon wafer transport robot.
Inventors:
LIU YANJIE (CN)
WU MINGYUE (CN)
RONG WEIBIN (CN)
SUN LINING (CN)
WU MINGYUE (CN)
RONG WEIBIN (CN)
SUN LINING (CN)
Application Number:
PCT/CN2012/083816
Publication Date:
September 19, 2013
Filing Date:
October 31, 2012
Export Citation:
Assignee:
HARBIN INST OF TECHNOLOGY (CN)
LIU YANJIE (CN)
WU MINGYUE (CN)
RONG WEIBIN (CN)
SUN LINING (CN)
LIU YANJIE (CN)
WU MINGYUE (CN)
RONG WEIBIN (CN)
SUN LINING (CN)
International Classes:
H01L21/677; F16H25/22; F16H37/02
Foreign References:
| CN101436562B | 2010-06-02 | |||
| CN102200181A | 2011-09-28 | |||
| CN101383313B | 2010-06-16 | |||
| CN102623375A | 2012-08-01 |
Attorney, Agent or Firm:
HARBIN SONGHUAJIANG PATENT TRADEMARK OFFICE et al. (CN)
哈尔滨市松花江专利商标事务所 (CN)
哈尔滨市松花江专利商标事务所 (CN)
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