Title:
WORKPIECE INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/084715
Kind Code:
A1
Abstract:
The present invention inspects the workpieces in a tray without a reduction in throughput, even when a large inspection tool is used. A workpiece inspection device 10 comprises a first stage 11 that transfers a first table 21 onto which a workpiece 30a from a tray 26 has been transported to a first handover position 31 to an inspection position 35, an inspection tool 15 that inspects workpieces 30 at the inspection position 35, a second stage 12 that transfers a second table 22 onto which a different workpiece 30b has been transported to a second handover position 32 to the inspection position 35 after the first table 21 has been withdrawn, and a transport unit 25 that transports workpieces 30 that have not been inspected from the tray 26 to the first handover position 31 and the second handover position 32 and transports workpieces 30a, 30b that have been inspected from the first handover position 31 and the second handover position 32 to the tray 26.
Inventors:
ISHIHARA MITSUHIRO (JP)
Application Number:
PCT/JP2022/039412
Publication Date:
April 25, 2024
Filing Date:
October 21, 2022
Export Citation:
Assignee:
TAKAOKA TOKO CO LTD (JP)
International Classes:
H01L21/60
Foreign References:
| JP2015135285A | 2015-07-27 | |||
| JP2009295814A | 2009-12-17 | |||
| JP2006090918A | 2006-04-06 | |||
| JP2016054256A | 2016-04-14 | |||
| JP2009038146A | 2009-02-19 | |||
| JP2015162590A | 2015-09-07 | |||
| JP2002357635A | 2002-12-13 | |||
| JP2013057572A | 2013-03-28 | |||
| JP2013160612A | 2013-08-19 |
Attorney, Agent or Firm:
TOKYO INTERNATIONAL PATENT FIRM (JP)
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