Title:
WORKPIECE HOLDING MECHANISM, WORKPIECE PROCESSING DEVICE, AND WORKPIECE HOLDING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/127061
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a workpiece holding mechanism capable of holding a workpiece at a desired spacing from the surface of a lower processing unit. A workpiece holding mechanism 10 according to an aspect of the present invention holds a plate-like or sheet-like workpiece P above a lower processing unit 2 at a spacing from the surface 2c of the lower processing unit 2, said workpiece holding mechanism 10 comprising: a frame body 11 that is provided so as to at least partially surround the periphery of the workpiece P in a planar view; a plurality of gripping parts 12 that are disposed on the frame body 11 and that grip peripheral parts of the workpiece P; a first sensor 13 that is capable of acquiring height information of each of the plurality of gripping parts 12; a calculation part 14 that calculates the distance from the lower processing unit 2 to each of the gripping parts 12 on the basis of the height information obtained by the first sensor 13; and a height adjustment part 15 that adjusts the heights of the plurality of gripping parts 12 from the lower processing unit 2 on the basis of the distances calculated by the calculation part 14.
Inventors:
ISHII TORU (JP)
WATANABE HIRONOBU (JP)
TAKEYAMA HIROTAKA (JP)
WATANABE HIRONOBU (JP)
TAKEYAMA HIROTAKA (JP)
Application Number:
PCT/JP2021/048699
Publication Date:
July 06, 2023
Filing Date:
December 27, 2021
Export Citation:
Assignee:
YAMAHA FINE TECH CO LTD (JP)
International Classes:
B23Q15/24; B26F1/00
Foreign References:
| JP2000183128A | 2000-06-30 | |||
| JP2001001282A | 2001-01-09 | |||
| JPS6268299A | 1987-03-28 | |||
| JP2000202799A | 2000-07-25 |
Other References:
TSUCHIDA KENGO: "Technical Factor on Open-Short Tester for Fine Pitch Flexible Printed Circuit Board", EREKUTORONIKUSU JISSO GAKKAISHI - JOURNAL OF JAPAN INSTITUTE OFELECTRONICS PACKAGING, EREKUTORONIKUSU JISSO GAKKAI, TOKYO, JP, vol. 7, no. 5, 1 August 2004 (2004-08-01), JP , pages 461 - 464, XP093074969, ISSN: 1343-9677
Attorney, Agent or Firm:
AMANO Kazunori (JP)
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