VAPORIZER AND PRODUCTION METHOD FOR ELEMENT STRUCTURE

Title:

VAPORIZER AND PRODUCTION METHOD FOR ELEMENT STRUCTURE

Document Type and Number:

WIPO Patent Application WO/2018/155419

Kind Code:

A1

Abstract:

This vaporizer is for supplying a vaporized resin material to a production device for an element structure. The vaporizer comprises: a vaporization tank that comprises an inner space that is for vaporizing a liquid resin material; a discharge part that sprays the liquid resin material into the inner space; a heating part that is arranged in the inner space so as to face the discharge part and that heats and vaporizes the sprayed liquid resin material; and a pooling part that is arranged in the inner space below the heating part. Liquid resin material that is not vaporized by the heating part drips down into the pooling part and is retained therein.

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Inventors:

AODAI MAKOTO (JP)
SEI KENSUKE (JP)
TAKAHASHI HIROHISA (JP)
YAJIMA TAKAHIRO (JP)
KATO YUKO (JP)

Application Number:

PCT/JP2018/005934

Publication Date:

August 30, 2018

Filing Date:

February 20, 2018

Export Citation:

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Assignee:

ULVAC INC (JP)

International Classes:

C23C14/24; H01L51/50; H05B33/04; H05B33/10

Domestic Patent References:

WO2014196137A1

2014-12-11

Foreign References:

JP2007103801A	2007-04-19
JP2003213422A	2003-07-30
JP2002173778A	2002-06-21
JP2008251614A	2008-10-16

Attorney, Agent or Firm:

OIKAWA Shu et al. (JP)

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