VAPOR DEPOSITION MASK AND METHOD FOR PRODUCING DISPLAY PANEL

Title:

VAPOR DEPOSITION MASK AND METHOD FOR PRODUCING DISPLAY PANEL

Document Type and Number:

WIPO Patent Application WO/2023/079584

Kind Code:

A1

Abstract:

A vapor deposition mask according to the present invention is provided with: a housing sheet (13); and a mask sheet (15) that is superposed on the housing sheet (13), while being provided with a plurality of opening parts (151, 152). The housing sheet (13) is provided with a half etching part (131) along the opening of a dummy opening part (152), which does not contribute to display among the opening parts (151, 152) of the mask sheet (15). Consequently, the present invention is capable of reducing residue of a cleaning liquid or foreign substances.

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Inventors:

NAKAJIMA SHINSAKU
INOUE TSUYOSHI

Application Number:

PCT/JP2021/040328

Publication Date:

May 11, 2023

Filing Date:

November 02, 2021

Export Citation:

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Assignee:

SHARP DISPLAY TECHNOLOGY CORP (JP)

International Classes:

C23C14/04; C23C14/24; C23C14/50; C23C14/54; C23C14/56; H05B33/10

Foreign References:

JP2010135269A	2010-06-17
US20160296966A1	2016-10-13
JP2010216000A	2010-09-30

Attorney, Agent or Firm:

HARAKENZO WORLD PATENT & TRADEMARK (JP)

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