Title:
VALVE
Document Type and Number:
WIPO Patent Application WO/2016/103893
Kind Code:
A1
Abstract:
Provided is a valve which does not open even if an operating fluid is supplied erroneously and which can prevent gas from being supplied unintentionally to a semiconductor manufacturing device, etc.
A valve 1 is provided with: a body 4 having formed therein a fluid inflow passage 4b and a fluid outflow passage 4c; a diaphragm 7 for opening and closing the fluid inflow passage 4b and the fluid outflow passage 4c; a stem 9 provided movable toward and away from the diaphragm 7 in order to cause the diaphragm 7 to open and close the fluid inflow passage 4b and the fluid outflow passage 4c; a bonnet 5 and a cap 6, which are connected to the body 4; a drive means (piston 10, operating fluid introduction chamber 10a, operating fluid introduction passage 10b, and first compression coil spring 11) provided within the bonnet 5 and the cap 6 and driving the stem 9 by means of operating fluid supplied from the outside; and a valve mechanism 20 provided to the bonnet 5 and the cap 6 and capable of opening and closing a passage for operating fluid leading to the drive means.
Inventors:
ZHANG ZHAOHONG (JP)
MATSUDA TAKAHIRO (JP)
MATSUDA TAKAHIRO (JP)
Application Number:
PCT/JP2015/080106
Publication Date:
June 30, 2016
Filing Date:
October 26, 2015
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K31/165; F16K35/02
Domestic Patent References:
| WO2007007726A1 | 2007-01-18 |
Foreign References:
| JP2013185677A | 2013-09-19 | |||
| JP2002195448A | 2002-07-10 |
Attorney, Agent or Firm:
WILLFORT INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Wil photograph international patent firm (JP)
Patent business corporation Wil photograph international patent firm (JP)
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