Title:
VALVE FOR VACUUM APPLICATION
Document Type and Number:
WIPO Patent Application WO/2011/030565
Kind Code:
A1
Abstract:
A valve for vacuum application, capable of being extremely easily maintained.
A valve for vacuum application, provided with opening surfaces (11, 18, 20) which serve as flow paths, the valve for vacuum application being configured in such a manner that the valve element (13) of the valve can be extracted from at least one of the opening surfaces.
Inventors:
WADA SHINICHI (JP)
SAKUMA MORIHIRO (JP)
TANAKA HIDETAKE (JP)
DEMURA YUUSUKE (JP)
NAKAJIMA KATSUJI (JP)
SAKUMA MORIHIRO (JP)
TANAKA HIDETAKE (JP)
DEMURA YUUSUKE (JP)
NAKAJIMA KATSUJI (JP)
Application Number:
PCT/JP2010/005582
Publication Date:
March 17, 2011
Filing Date:
September 13, 2010
Export Citation:
Assignee:
ULVAC INC (JP)
WADA SHINICHI (JP)
SAKUMA MORIHIRO (JP)
TANAKA HIDETAKE (JP)
DEMURA YUUSUKE (JP)
NAKAJIMA KATSUJI (JP)
WADA SHINICHI (JP)
SAKUMA MORIHIRO (JP)
TANAKA HIDETAKE (JP)
DEMURA YUUSUKE (JP)
NAKAJIMA KATSUJI (JP)
International Classes:
F16K51/02; F16K27/02; F16K43/00
Domestic Patent References:
| WO2008018405A1 | 2008-02-14 |
Foreign References:
| JP2008045640A | 2008-02-28 | |||
| JPS58111491U | 1983-07-29 | |||
| JPH0771649A | 1995-03-17 |
Attorney, Agent or Firm:
SHIMIZU, YOSHIHIRO (JP)
Yoshihiro Shimizu (JP)
Yoshihiro Shimizu (JP)
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