Title:
VALVE AND INTERCONNECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/021967
Kind Code:
A1
Abstract:
A valve and an interconnection device comprising the valve, relating to the technical field of valve control. Provided is a valve occupying a small space. The valve (2) is used for connecting a first cavity (1) and a second cavity (3). The valve (2) may comprise: a valve body (21), an execution structure provided in the valve body (21), and a sealing block (24) connected to the execution structure; the valve (2) has a first surface (A1) and a second surface (A2) opposite to each other; the first surface (A1) is provided with a plurality of first mounting holes (211), the first mounting holes (211) penetrate from the first surface (A1) to the second surface (A2), and the first mounting holes (211) are used for mounting a first connecting member (291) connected to the first cavity (1); the second surface (A2) is provided with a plurality of second mounting holes (212), and the second mounting holes (212) are used for mounting a second connecting member (292) connected to the second cavity (3). The two types of mounting holes formed on one flange plate on the valve body (21) achieve the connection of different cavities, so that the valve (2) meets the requirement for defining the valve mounting space in a semiconductor manufacturing device.
Inventors:
JIANG PEIYING (CN)
LI QIANG (CN)
LI QIANG (CN)
Application Number:
PCT/CN2023/103034
Publication Date:
February 01, 2024
Filing Date:
June 28, 2023
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
F16K51/02; F16K3/316; F16L23/02; H01L21/67
Foreign References:
| TWM333496U | 2008-06-01 | |||
| TW200628714A | 2006-08-16 | |||
| CN107289147A | 2017-10-24 | |||
| TW201235589A | 2012-09-01 | |||
| CN110332392A | 2019-10-15 | |||
| TW201602482A | 2016-01-16 | |||
| KR20160059967A | 2016-05-27 | |||
| US20060202479A1 | 2006-09-14 | |||
| JPH08255804A | 1996-10-01 | |||
| JP2014196821A | 2014-10-16 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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