Title:
VALVE DEVICE, AND FLUID CONTROL DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE USING THIS VALVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/107123
Kind Code:
A1
Abstract:
[Problem] To provide a valve device in which an orifice is installed and which can be manufactured at low cost. [Solution] A valve body 20 defines: a housing recess 22 which is opened at the surface of the valve body 20 and which receives a valve element; and a primary-side channel 21 and a secondary-side channel 24 connected to the housing recess 22. The valve element 2 comprises: sealing portions 50b2, 50b3 that block direct communication between the primary-side channel 21 and the secondary-side channel 24 through the housing recess 22; and through channels 50, 16p that allow the primary-side channel 21 and the secondary-side channel 24 with communicate to each other through the valve element 2. An orifice 16p is formed in the through channels 50, 16p.
Inventors:
WATANABE KAZUNARI (JP)
SHIGYOU KOHEI (JP)
AIKAWA KENJI (JP)
NAKATA TOMOHIRO (JP)
MATSUDA TAKAHIRO (JP)
SHINOHARA TSUTOMU (JP)
SHIGYOU KOHEI (JP)
AIKAWA KENJI (JP)
NAKATA TOMOHIRO (JP)
MATSUDA TAKAHIRO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/041779
Publication Date:
June 06, 2019
Filing Date:
November 12, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K1/42; F16K1/00; F16K7/14; F16K27/02
Foreign References:
| JPH0333566A | 1991-02-13 | |||
| JP2000213667A | 2000-08-02 |
Attorney, Agent or Firm:
FUJIMOTO Kenji (JP)
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