Title:
VALVE CONTROL DEVICE AND METHOD, AND SEMICONDUCTOR PROCESSING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2023/216840
Kind Code:
A1
Abstract:
Disclosed is a valve control device, comprising a first detection module (41) and a control module (42). The first detection module (41) is used for detecting an opening action and a closing action of a switch valve (2) in each acquisition period, converting the opening action and the closing action into electric signals, and sending the electric signals to the control module. The control module is used for: sending an opening signal to a pilot valve (1) in the acquisition period according to a preset holding time of after opening of the switch valve and the number of cycles of the acquisition period; and determining, according to the electrical signals sent by the first detection module (41), whether the state of the switch valve (2) is normal. The state of the switch valve is monitored, so that when a fault occurs to the switch valve, the fault can be timely known, thereby ensuring the correctness of process results, and improving the safety and stability of equipment. Also disclosed are a valve control method and semiconductor processing equipment.
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Inventors:
ZHANG LIJUN (CN)
ZHANG FANG (CN)
ZHANG FANG (CN)
Application Number:
PCT/CN2023/089709
Publication Date:
November 16, 2023
Filing Date:
April 21, 2023
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
F16K37/00
Foreign References:
| CN114738545A | 2022-07-12 | |||
| CN102566475A | 2012-07-11 | |||
| CN104571149A | 2015-04-29 | |||
| US20150168932A1 | 2015-06-18 | |||
| US20200142795A1 | 2020-05-07 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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