Title:
VACUUM VALVE
Document Type and Number:
WIPO Patent Application WO/2020/166836
Kind Code:
A1
Abstract:
The present invention provides a vacuum valve which is configured such that gas supplied from an external source is injected near a sealing ring formed in a sealing member, whereby even when, in a state where a fluid discharge part is opened for an air cleaning operation, the sealing ring is exposed to a portion through which a fluid is moving, the sealing ring is prevented from being damaged by process byproducts such as particles, and thus the reliability of sealing of the vacuum valve can be ensured.
Inventors:
JEONG GYU JAE (KR)
JIN JI HYE (KR)
JIN JI HYE (KR)
Application Number:
PCT/KR2020/000937
Publication Date:
August 20, 2020
Filing Date:
January 20, 2020
Export Citation:
Assignee:
PRESYSCO LTD (KR)
International Classes:
F16K51/02; F16K1/24; F16K27/02
Foreign References:
| JPH06323467A | 1994-11-25 | |||
| JP2000257750A | 2000-09-19 | |||
| JP2006283935A | 2006-10-19 | |||
| JP2000074228A | 2000-03-14 | |||
| JP2002246380A | 2002-08-30 |
Attorney, Agent or Firm:
STYP PATENT LAW FIRM (KR)
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