VACUUM PUMP AND CONTROL DEVICE

WIPO Patent Application WO/2019/044674

A1

[Problem] To provide a vacuum pump and a control device with which highly precise and stable control can be performed during steady operation, and in which the vacuum pump withstands disturbance, the pump stop time is brief, and the pump can be reduced in size. [Solution] Positional deviation calculated by a subtracter 1 is inputted to PIDs 22, 32, 42, which are in three modes. The PID 22 is a PID regulator for a high-bias mode, the PID 32 is a PID regulator for a high-rigidity mode, and the PID 42 is a PID regulator for a low-rigidity mode. An output signal of the PID 42 is extracted as the amount of change of an indicator current with each clock of a PWM frequency, and is designed such that an average value ΔC of the amount of change of the indicator current among several clocks is acquired in a calculation unit 41. A switching control unit 45 computes whether or not the magnitude of the average value ΔC of the amount of change of the indicator current averaged in this case is greater than a prescribed value set in advance, and in accordance with the result of computation, an α value is outputted from the switching control unit 45 in a range of 0-1.

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EZAWA YOSHIMASA (JP)
FUKAMI HIDEO (JP)
SATO KOU (JP)

PCT/JP2018/031269

March 07, 2019

August 24, 2018

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EDWARDS JAPAN LTD (JP)

F04D19/04; F16C32/04

JPH1037958A	1998-02-13
JP2013130180A	2013-07-04
JP2005290998A	2005-10-20
JP2005502004A	2005-01-20
JP2000283159A	2000-10-13
JP2004150628A	2004-05-27
JP2004286045A	2004-10-14
JP2014110653A	2014-06-12

See also references of EP 3677785A4

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