Title:
VACUUM GATE VALVE AND VACUUM SYSTEM COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/182741
Kind Code:
A1
Abstract:
The present invention relates to a vacuum gate valve and a vacuum system comprising same, the vacuum gate valve comprising: a valve body having an inlet port and a discharge port formed therein; a blocking plate installed on a flow passage between the inlet port and the discharge port; a driver which is installed in the valve body to be connected to the blocking plate, and moves the blocking plate so that the flow passage can be opened/closed; and a light-transmission plate which is installed in an opening formed in the blocking plate, and transmits the light between the inlet port and the discharge port while the blocking plate is closed.
Inventors:
KIM EUN DO (KR)
LEE MI RYEONG (KR)
LEE MI RYEONG (KR)
Application Number:
PCT/KR2023/003647
Publication Date:
September 28, 2023
Filing Date:
March 20, 2023
Export Citation:
Assignee:
ASTROTEK CO LTD (KR)
International Classes:
H01L21/67; C23C16/44; F16K3/02; F16K51/02
Foreign References:
| JPH056263U | 1993-01-29 | |||
| KR20040059171A | 2004-07-05 | |||
| JP2016092330A | 2016-05-23 | |||
| JP2007051743A | 2007-03-01 | |||
| KR100446455B1 | 2004-09-01 |
Attorney, Agent or Firm:
ZENA PATENT LAW FIRM (KR)
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