Title:
VACUUM GATE VALVE, AND GATE OPENING/CLOSING METHOD USING THE GATE VALVE
Document Type and Number:
WIPO Patent Application WO/2009/057513
Kind Code:
A1
Abstract:
In the transition containing the movement for the gate refuge and closure from
an open state to a closed state and from the closed state to the open state, the intrusion
and adhesion of a foreign substance into and to a gate refuge chamber are reduced.
When the gate is housed in the gate refuge chamber, the shutter is moved in a shutter
moving chamber so that a shutter sealing portion contacts a stationary seal portion,
thereby to close an entrance. At the same time, the gate is moved in the shutter
moving chamber so that a first gate seal portion contacts a stationary seal, thereby
to close a discharge port. At this time, the shutter sealing portion is moved
in the shutter moving chamber so that it contacts a second gate seal portion, thereby
to close the entrance.
Inventors:
NAGAI HIDEAKI (JP)
HISAE TAKASHI (JP)
HISAE TAKASHI (JP)
Application Number:
PCT/JP2008/069292
Publication Date:
May 07, 2009
Filing Date:
October 17, 2008
Export Citation:
Assignee:
V TEX CORP (JP)
NAGAI HIDEAKI (JP)
HISAE TAKASHI (JP)
NAGAI HIDEAKI (JP)
HISAE TAKASHI (JP)
International Classes:
F16K51/02; H01L21/677
Domestic Patent References:
| WO2007066537A1 | 2007-06-14 | |||
| WO2006132455A1 | 2006-12-14 |
Foreign References:
| JPH04106583U | 1992-09-14 | |||
| JP2005009678A | 2005-01-13 | |||
| JP2004108471A | 2004-04-08 | |||
| JPS4863832U | 1973-08-14 |
Attorney, Agent or Firm:
TAKADA, Yukihiko (Mito-shi, Ibaraki, JP)
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