Title:
ULTRAPURE WATER PRODUCTION DEVICE AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/053305
Kind Code:
A1
Abstract:
A ultrapure water production device (100) capable of removing a trace amount of an acidic substance such as dissolved oxygen comprises: a primary pure water tank (110) which receives water to be treated, such as primary pure water; a pump (120) which feeds the water in the primary pure water tank (110); a ultraviolet ray irradiation device (140) which is arranged on the secondary side of the pump (120); and a dissolved oxygen removal device (10) which is arranged at the rear stage of the ultraviolet ray irradiation device (140) and removes at least dissolved oxygen. In the ultrapure water production device (100), at least a portion of the produced ultrapure water is circulated into the primary pure water tank. The dissolved oxygen removal device (10) is provided with a positive electrode (11), a negative electrode (12), and a dissolved oxygen removal chamber (23) which is arranged between the positive electrode (11) and the negative electrode (12) and in which an ion exchanger is filled, in which at least a portion of the ion exchanger comprises an ion exchanger having a metal catalyst supported thereon, and a direct current is applied between the positive electrode (11) and the negative electrode (12).
Inventors:
ICHIHARA FUMITAKA (JP)
SASAKI KEISUKE (JP)
KONDO TSUKASA (JP)
SASAKI KEISUKE (JP)
KONDO TSUKASA (JP)
Application Number:
PCT/JP2023/028559
Publication Date:
March 14, 2024
Filing Date:
August 04, 2023
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
B01D61/48; B01D61/58; C02F1/32; C02F1/44; C02F1/469; C02F1/70; C02F9/00
Foreign References:
| JP2022086465A | 2022-06-09 | |||
| JPH10272474A | 1998-10-13 | |||
| JP2010017633A | 2010-01-28 | |||
| JP2015166064A | 2015-09-24 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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