Title:
TUNING METHOD FOR RADIO-FREQUENCY POWER SOURCE
Document Type and Number:
WIPO Patent Application WO/2023/029371
Kind Code:
A1
Abstract:
Disclosed in the present disclosure is a tuning method for a radio-frequency power source. A radio-frequency power source comprises a frequency control module and a closed-loop controller. The method comprises: changing the frequency of a radio-frequency power source, and establishing a corresponding curve in a complex plane; taking any point in the complex plane as a start point, taking the origin of the complex plane or a point near the origin as an end point, and taking the start point and the end point as a reference vector; determining whether a curve is a target curve, and if the curve is not the target curve, obtaining a correction curve by means of curve transformation; the reference vector dividing the target curve or the correction curve into a left area and a right area; and adjusting the frequency of the radio-frequency power source according to whether the position at which a complex value on the target curve or the correction curve is located is in the left area or the right area. The tuning method for a radio-frequency power source provided in the present disclosure has a simple and efficient calculation mode; by means of the present method, the defect in the prior art of it being impossible to perform frequency adjustment on a non-target curve can be overcome; and the method has stronger adaptability.
Inventors:
QIU WENJIE (CN)
LIU YANG (CN)
LIU YANG (CN)
Application Number:
PCT/CN2022/074097
Publication Date:
March 09, 2023
Filing Date:
January 26, 2022
Export Citation:
Assignee:
SICHUAN INJET ELECTRIC CO LTD (CN)
International Classes:
H03J7/04
Foreign References:
CN113472319A | 2021-10-01 | |||
CN109156075A | 2019-01-04 | |||
CN110495148A | 2019-11-22 | |||
CN108573848A | 2018-09-25 | |||
US20170330731A1 | 2017-11-16 |
Attorney, Agent or Firm:
CHOFN INTELLECTUAL PROPERTY (CN)
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