Title:
TRANSPORTATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/055352
Kind Code:
A1
Abstract:
The transportation device provided in the embodiments of the present application is configured to connect to an air suction pump. The transportation device comprises: a base platform and a sliding assembly, wherein the base platform comprises a plurality of through holes, which are configured to connect with an air inlet of the air suction pump; and the sliding assembly is arranged on the base platform and comprises a guide rail and a sliding seat, the guide rail extending in a first direction, the sliding seat being movably connected to the guide rail, and the plurality of through holes being arranged along the guide rail.
Inventors:
JIANG XIAOEN (CN)
ZHANG NINGNA (CN)
ZHANG LIN (CN)
ZHANG LAN (CN)
CHEN DINGCAO (CN)
ZHANG NINGNA (CN)
ZHANG LIN (CN)
ZHANG LAN (CN)
CHEN DINGCAO (CN)
Application Number:
PCT/CN2022/120853
Publication Date:
March 21, 2024
Filing Date:
September 23, 2022
Export Citation:
Assignee:
TAIWAN SEMICONDUCTOR MFG CO LTD (CN)
TSMC CHINA COMPANY LTD (CN)
TSMC CHINA COMPANY LTD (CN)
International Classes:
H01L21/677
Foreign References:
| CN101048327A | 2007-10-03 | |||
| TW202226400A | 2022-07-01 | |||
| CN217055971U | 2022-07-26 | |||
| JP2005101598A | 2005-04-14 | |||
| CN101090085A | 2007-12-19 | |||
| JP2017227726A | 2017-12-28 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
Download PDF:
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