Title:
TRANSPORT SYSTEM AND TRANSPORT METHOD
Document Type and Number:
WIPO Patent Application WO/2017/098813
Kind Code:
A1
Abstract:
A track 10 of a transport system 1 is provided with a stand-by section 30 for having a transport vehicle 20 stand by in correspondence to a specific processing device 100A. A controller 50, upon learning of the presence of a transport request for transporting a front opening unified pod (FOUP) 90 to a load port 101 of the specific processing device 100A, allocates to the transport vehicle 20 a first transport command for transporting the FOUP 90 to the stand-by section 30. The transport vehicle 20, upon arriving at the stand-by section 30, stands by while holding the FOUP 90. Thereafter, the controller 50, upon learning that the situation is such that the FOUP 90 can be transported to the load port 101 of the specific processing device 100A, allocates to the transport vehicle 20 a second transport command for transporting the FOUP 90 to the load port 101 of the specific processing device 100A.
Inventors:
HARASAKI KAZUMI (JP)
Application Number:
PCT/JP2016/080976
Publication Date:
June 15, 2017
Filing Date:
October 19, 2016
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/677; G05D1/02
Foreign References:
| JP2013125788A | 2013-06-24 | |||
| JP2001034342A | 2001-02-09 | |||
| JP2010067146A | 2010-03-25 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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