Title:
THREE-SIDE CONVEYOR EQUIPMENT FOR SILICON WAFERS
Document Type and Number:
WIPO Patent Application WO/2024/087773
Kind Code:
A1
Abstract:
A three-side conveyor equipment for silicon wafers is provided, including an insertion container. A bottom conveyor belt and two side conveyor belts are arranged in the insertion container, the two side conveyor belts are arranged opposite to each other above the bottom conveyor belt, the bottom conveyor belt is connected to the side conveyor belts through a transmission assembly, and a linear speed of the bottom conveyor belt is same as a linear speed of each of the side conveyor belts, and each of the side conveyor belts is arranged on a movable bracket that drives the side conveyor belt to clamp or loosen, and the insertion container is provided with two pushing assemblies that respectively push the two movable brackets to move. The two side conveyor belts can clamp or loosen the silicon wafers, and at the same time maintain a same linear speed as the bottom conveyor belt.
Inventors:
QU MENGCHENG (CN)
WU RUI (CN)
BAI DAWEI (CN)
WU ZHIJUN (CN)
CAO ZHENGMIN (CN)
LI RUIPENG (CN)
WANG DAWEI (CN)
WAN YAO (CN)
YIN XIANZHENG (CN)
YANG CHEN (CN)
WU RUI (CN)
BAI DAWEI (CN)
WU ZHIJUN (CN)
CAO ZHENGMIN (CN)
LI RUIPENG (CN)
WANG DAWEI (CN)
WAN YAO (CN)
YIN XIANZHENG (CN)
YANG CHEN (CN)
Application Number:
PCT/CN2023/110425
Publication Date:
May 02, 2024
Filing Date:
July 31, 2023
Export Citation:
Assignee:
TCL ZHONGHUAN RENEWABLE ENERGY TECH CO LTD (CN)
International Classes:
H01L21/677
Foreign References:
| CN218730843U | 2023-03-24 | |||
| CN208400828U | 2019-01-18 | |||
| CN213546288U | 2021-06-25 | |||
| CN110828358A | 2020-02-21 | |||
| CN114883233A | 2022-08-09 | |||
| CN204384268U | 2015-06-10 | |||
| JPH0243130A | 1990-02-13 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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