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Title:
THERMOPLASTIC POLYURETHANE FOR POLISHING LAYER, POLISHING LAYER, AND POLISHING PAD
Document Type and Number:
WIPO Patent Application WO/2023/054331
Kind Code:
A1
Abstract:
Provided is a thermoplastic polyurethane for a polishing layer in which the D hardness in a sheet with a thickness of 2 mm after saturating the sheet with water at a temperature of 50ºC and causing the sheet to swell is less than 50, and in which the contact angle with water in a sheet with a thickness of 200 μm is 70 degrees or less.

Inventors:
SUNAYAMA AZUSA (JP)
GOSHI YUKO (JP)
KATO MITSURU (JP)
Application Number:
PCT/JP2022/035870
Publication Date:
April 06, 2023
Filing Date:
September 27, 2022
Export Citation:
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Assignee:
KURARAY CO (JP)
International Classes:
B24B37/24; C08G18/48; C08G18/66; C08J5/14; H01L21/304
Domestic Patent References:
WO2020115968A12020-06-11
WO2008012909A12008-01-31
WO2016067588A12016-05-06
Foreign References:
US20150311093A12015-10-29
US20100273399A12010-10-28
Attorney, Agent or Firm:
OHTANI PATENT OFFICE (JP)
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