Title:
TEMPERATURE ADJUSTMENT UNIT
Document Type and Number:
WIPO Patent Application WO/2022/123846
Kind Code:
A1
Abstract:
This temperature adjustment unit comprises: a placement unit (10) onto which a heat transfer target object is placed and which has a substantially flat plate shape; a heating unit (20) for heating the heat transfer target object placed on the placement unit (10); and a heat transfer unit (30) which is provided to be in contact with at least any one among the placement unit (10) and the heating unit (20), and has at least a portion formed of a metal porous structure.
Inventors:
HATANO SHUHEI (JP)
MORIUCHI HIDEKI (JP)
MORIUCHI HIDEKI (JP)
Application Number:
PCT/JP2021/033520
Publication Date:
June 16, 2022
Filing Date:
September 13, 2021
Export Citation:
Assignee:
TOMOEGAWA CO LTD (JP)
International Classes:
H01L23/36; F24H1/10; H01L23/473; H05B3/10; H05B3/74
Foreign References:
| JP2001267403A | 2001-09-28 | |||
| JP2000101004A | 2000-04-07 | |||
| JP2013145835A | 2013-07-25 | |||
| JP2003249781A | 2003-09-05 | |||
| JP2007250313A | 2007-09-27 | |||
| JP2007149727A | 2007-06-14 |
Attorney, Agent or Firm:
KASHIMA Hiromoto (JP)
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