Title:
XYθ TABLE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/093046
Kind Code:
A1
Abstract:
In the present invention, one first driving unit (5), which moves back and forth along an X direction and applies X-direction drive power to a mobile table (2), is disposed so as to apply X-direction drive power to a Y-direction center position of one X-direction end part of the mobile table (2). Two second driving units (6, 7), which move back and forth in a Y direction perpendicular to the X direction and apply Y-direction drive power to the mobile table (2), are disposed so as to have point symmetry about the center (O) of the mobile table (2). A plurality of planar guide bearings (3) are disposed in positions such that the sum of moment forces of the respective planar guide bearings (3) is zero in a central axis line along the X direction of the mobile table (2). The moment force is a product of a frictional force occurring in the planar guide bearings (3) due to the movement of the mobile table (2) and the Y-direction distance from the planar guide bearings (3) to the first driving unit (5).
Inventors:
HIGUCHI HIDEYA (JP)
NAKAMURA TSUYOSHI (JP)
NAKAMURA TSUYOSHI (JP)
Application Number:
PCT/JP2014/006263
Publication Date:
June 25, 2015
Filing Date:
December 16, 2014
Export Citation:
Assignee:
NSK LTD (JP)
International Classes:
G12B5/00; B23Q1/40; B23Q1/48; B23Q1/62; F16C29/00
Foreign References:
| JP2009063540A | 2009-03-26 | |||
| JPH0899243A | 1996-04-16 | |||
| JPH09155666A | 1997-06-17 | |||
| JP2001350278A | 2001-12-21 | |||
| JP2004301256A | 2004-10-28 |
Other References:
See also references of EP 3070716A4
Attorney, Agent or Firm:
MORI, Tetsuya et al. (JP)
Woods Tetsuya (JP)
Woods Tetsuya (JP)
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