Title:
SYSTEM FOR CONTROLLING ON/OFF OF STATIC ELECTRICITY REMOVAL DEVICE BY USING VACUUM ULTRAVIOLET RAYS
Document Type and Number:
WIPO Patent Application WO/2021/194041
Kind Code:
A1
Abstract:
A system for controlling the on/off of a static electricity removal device by using vacuum ultraviolet rays, according to the present invention, comprises: a vacuum chamber of which the inside is filled with inert gas and which has, at one side, an inlet through which an object to enters; a sensor module which is provided inside the vacuum chamber and which detects the object coming within a detection range; a control module, which is arranged outside the vacuum chamber, receives a detection signal for the object from the sensor module so as to enable on/off control for a static electricity removal device, and can adjust the emission time of the static electricity removal device; and the static electricity removal device which is arranged inside the vacuum chamber so that the on/off thereof is controlled by the control module, and which emits vacuum ultraviolet light at the upper part of the object so as to neutralize the static electricity of the object.
Inventors:
LEE DONG HOON (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
SON MIN SEOK (KR)
JANG HO KYUNG (KR)
LIM JI HYUNG (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
SON MIN SEOK (KR)
JANG HO KYUNG (KR)
LIM JI HYUNG (KR)
Application Number:
PCT/KR2020/016452
Publication Date:
September 30, 2021
Filing Date:
November 20, 2020
Export Citation:
Assignee:
SUNJE HI TEK CO LTD (KR)
International Classes:
H05F3/00; H01J61/12; H01J61/30
Foreign References:
| JPH088319A | 1996-01-12 | |||
| KR20170008370A | 2017-01-24 | |||
| JP2005216565A | 2005-08-11 | |||
| JP2004304123A | 2004-10-28 | |||
| KR20180098618A | 2018-09-04 |
Attorney, Agent or Firm:
KWAK, Chul Keun (KR)
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