Title:
SURFACE EMITTING LASER, METHOD FOR FABRICATING SURFACE EMITTING LASER
Document Type and Number:
WIPO Patent Application WO/2023/188405
Kind Code:
A1
Abstract:
A vertical cavity surface emitting laser (VCSEL) includes a distributed Bragg reflector (DBR) including a first dielectric layer and a second dielectric layer alternately arranged in a first axial direction; and a semiconductor section including a p-type III nitride region, a III nitride region, and a III nitride active region between the p-type III nitride region and the III nitride region, the p-type III nitride region, the III nitride active region, and the III nitride region being arranged in the first axial direction, the III nitride region including an n-type III nitride region. The semiconductor section includes a monolithic grating having a periodic one-dimensional pattern. The monolithic grating, the III nitride active region, and the distributed Bragg reflector are arranged in the first axial direction to form an optical cavity. The periodic one-dimensional pattern extends in a second axial direction that intersects the first axial direction.
Inventors:
GANDROTHULA SRINIVAS (JP)
Application Number:
PCT/JP2022/016925
Publication Date:
October 05, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
SANOH IND CO LTD (JP)
International Classes:
H01S5/183
Foreign References:
| JP2011040557A | 2011-02-24 | |||
| US20130209110A1 | 2013-08-15 | |||
| JP2005039102A | 2005-02-10 | |||
| US20180248339A1 | 2018-08-30 | |||
| US20140098833A1 | 2014-04-10 |
Other References:
GANDROTHULA SRINIVAS, KAMIKAWA TAKESHI, SPECK JAMES S., NAKAMURA SHUJI, DENBAARS STEVEN P.: "Study of surface roughness of lifted-off epitaxial lateral overgrown GaN layers for the n-DBR mirror of a III-nitride vertical-cavity surface emitting laser", APPLIED PHYSICS EXPRESS, JAPAN SOCIETY OF APPLIED PHYSICS; JP, JP, vol. 14, no. 3, 1 March 2021 (2021-03-01), JP , pages 031002, XP093097561, ISSN: 1882-0778, DOI: 10.35848/1882-0786/abdcd6
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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