Title:
SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/058751
Kind Code:
A1
Abstract:
The present invention reliably suctions a substrate regardless of the flatness of a surface to be suctioned of the substrate. A substrate suction member 330 includes: a porous member 334 having a substrate suction surface 334a for suctioning a substrate WF, and a decompression part 334b communicating with a decompression means; a shield member 332 having a first shield member 332-1 for shielding a surface 334c on the opposite side to the substrate suction surface 334a of the porous member 334, and a frame-shaped second shield member 332-2 for shielding at least a portion of a side surface 334d of the porous member 334; and a frame-shaped elastic seal member 336 attached to the second shield member 332-2 so as to surround the porous member 334, and having a contact surface 336a contacting the substrate WF.
Inventors:
TAJIMA KAZUHIRO (JP)
KASHIWAGI MAKOTO (JP)
FURUSAWA MANATO (JP)
KASHIWAGI MAKOTO (JP)
FURUSAWA MANATO (JP)
Application Number:
PCT/JP2022/037612
Publication Date:
April 13, 2023
Filing Date:
October 07, 2022
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
B24B37/30; B24B37/32; H01L21/683
Foreign References:
| JP2021079488A | 2021-05-27 | |||
| JP2020168675A | 2020-10-15 |
Attorney, Agent or Firm:
MIYAMAE, Toru et al. (JP)
Download PDF: