Title:
SUBSTRATE PROCESSING SYSTEM COMPRISING GATE VALVE ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2024/085527
Kind Code:
A1
Abstract:
The present invention relates to a substrate processing system comprising a gate valve assembly. A gate assembly may comprise a housing body, an adaptor unit, a cover unit, and a valve housing. The housing body is located between a first device and a second device, comprises side walls provided with a first gate facing the gate of the first device and a second gate facing the gate of the second device, and has an open upper surface. The adaptor unit is provided with an opening having a size corresponding to the second gate, and can be attached to/detached from the housing body at the circumference of the first gate. The cover unit is attachable/detachable so as to selectively shield the open upper surface of the housing body. The valve housing may comprise a valve housing which is installed on one surface of the adaptor unit and is in surface-contact with the outer wall of the first device.
Inventors:
KIM YOUNG SOO (KR)
JONG CHONG HWAN (KR)
CHOI JEONG YEOL (KR)
JONG CHONG HWAN (KR)
CHOI JEONG YEOL (KR)
Application Number:
PCT/KR2023/015687
Publication Date:
April 25, 2024
Filing Date:
October 12, 2023
Export Citation:
Assignee:
WONIK IPS CO LTD (KR)
International Classes:
H01L21/67; F16K3/02
Foreign References:
| CN207338316U | 2018-05-08 | |||
| KR20190085488A | 2019-07-18 | |||
| KR20200113542A | 2020-10-07 | |||
| KR20170076159A | 2017-07-04 | |||
| JP2022018902A | 2022-01-27 |
Attorney, Agent or Firm:
KIM, Seong Nam (KR)
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