Title:
SUBSTRATE CONVEYANCE ROBOT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/080332
Kind Code:
A1
Abstract:
This substrate conveyance robot system (100) comprises a substrate-holding hand (23) that holds each of a plurality of substrates, a robot arm (21), and a control unit (30). The control unit (30) acquires, on the basis of a result of detection performed by a detection unit (60), an offset amount in the positioning of each of the plurality of substrates relative to a prescribed reference position, and controls the conveyance operation of the robot arm (21), which conveys the plurality of substrates, so that each of the plurality of substrates is conveyed individually to a placement part and/or is conveyed individually from the placement part on the basis of each of the acquired offset amounts.
Inventors:
IMANISHI HIROKI
KITANO SHINYA
NAKAYA ATSUSHI
KITANO SHINYA
NAKAYA ATSUSHI
Application Number:
PCT/JP2023/037070
Publication Date:
April 18, 2024
Filing Date:
October 12, 2023
Export Citation:
Assignee:
KAWASAKI JUKOGYO KK (JP)
International Classes:
H01L21/677; B25J13/08
Attorney, Agent or Firm:
MIYAZONO Hirokazu (JP)
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