Title:
SUBSTRATE CONTAINER
Document Type and Number:
WIPO Patent Application WO/2024/084722
Kind Code:
A1
Abstract:
Provided is a substrate container equipped with a valve structure having improved valve opening/closing reliability. The substrate container comprises a container main body for accommodating a substrate, a lid for closing an opening of the container main body, and a valve structure (40) for controlling a gas flow through the container main body, wherein the valve structure (40) comprises: a block member (41) having communication passages (416, 417) formed therein which enable the inside of the container main body to communicate with the outside thereof via a valve hole (466); and an elastically deformable, platy valve member (45) for opening/closing the valve hole (466). In the valve structure (40), a valve seat (467) around the valve hole (466) and the sealing surface (452a) of the valve member (45) are in contact with each other while curving downstream along a gas-flow direction.
Inventors:
OGAWA OSAMU (JP)
TOMINAGA KIMINORI (JP)
TOMINAGA KIMINORI (JP)
Application Number:
PCT/JP2023/012698
Publication Date:
April 25, 2024
Filing Date:
March 28, 2023
Export Citation:
Assignee:
SHIN ETSU POLYMER CO LTD (JP)
International Classes:
H01L21/673; B65D85/30; F16K15/16; F16K24/00
Domestic Patent References:
| WO2022168287A1 | 2022-08-11 |
Foreign References:
| JP2020088278A | 2020-06-04 | |||
| JP2002253689A | 2002-09-10 | |||
| JP2004533586A | 2004-11-04 |
Attorney, Agent or Firm:
SAKAMOTO & PARTNERS (JP)
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