Title:
STORAGE ARRAY AND PREPARATION METHOD THEREFOR, AND MEMORY AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/037163
Kind Code:
A1
Abstract:
The embodiments of the present application relate to the technical field of semiconductors. Disclosed are a storage array and a preparation method therefor, and a memory and an electronic device, wherein the storage array comprises: a substrate and storage unit sub-arrays; each storage unit sub-array comprises: a stack structure, a first channel layer, a first gate dielectric layer, and a first gate electrode; the stack structure comprises a conductive layer and a storage function layer, wherein the conductive layer comprises conductive blocks, the storage function layer being arranged between two adjacent conductive blocks, and the two adjacent conductive blocks and the storage function layer forming a storage unit; the first channel layer corresponds to the storage unit, and at least part of the first channel layer is located on a side wall of the stack structure and is in contact with the two adjacent conductive blocks and the storage function layer, which are in the storage unit; the two adjacent conductive blocks, the first channel layer, the first gate dielectric layer and the first gate electrode form a first transistor; and the storage array is of a 3D architecture, and the first transistor is a field effect transistor of a vertical channel structure, such that the number of storage units and the number of first transistors can be increased, thereby increasing the storage density.
Inventors:
HUANG KAILIANG (CN)
JING WEILIANG (CN)
SUN YING (CN)
WANG ZHENGBO (CN)
LIAO HENG (CN)
JING WEILIANG (CN)
SUN YING (CN)
WANG ZHENGBO (CN)
LIAO HENG (CN)
Application Number:
PCT/CN2023/100031
Publication Date:
February 22, 2024
Filing Date:
June 13, 2023
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H01L27/105; H01L27/10
Foreign References:
| CN111180459A | 2020-05-19 | |||
| CN104037175A | 2014-09-10 | |||
| US20160204122A1 | 2016-07-14 | |||
| CN113299660A | 2021-08-24 | |||
| CN110914990A | 2020-03-24 | |||
| CN113707666A | 2021-11-26 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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