Title:
STATIC ELECTRICITY ELIMINATING APPARATUS USING EXCIMER LAMP
Document Type and Number:
WIPO Patent Application WO/2022/114721
Kind Code:
A1
Abstract:
A static electricity eliminating apparatus using an excimer lamp that is installed in a vacuum chamber according to the present invention comprises: a body having an accommodation space formed therein for accommodating an excimer lamp module, and an opening that is in communication with a part of the accommodation space; the excimer lamp module which is provided in the accommodation space and includes an excimer lamp radiating vacuum ultraviolet ray and an irradiation unit for irradiating the radiated vacuum ultraviolet ray into the vacuum chamber; and a socket unit including a connector which is formed on one side of the body and electrically connects the excimer lamp and a voltage generation device that is provided inside or outside.
Inventors:
LEE DONG HOON (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
SEOL DONG KYU (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
SEOL DONG KYU (KR)
Application Number:
PCT/KR2021/017248
Publication Date:
June 02, 2022
Filing Date:
November 23, 2021
Export Citation:
Assignee:
SUNJE HI TEK CO LTD (KR)
International Classes:
H05F3/00; H01J61/02; H01J61/073; H01J61/30
Foreign References:
| KR102065347B1 | 2020-01-13 | |||
| US5559584A | 1996-09-24 | |||
| KR200367905Y1 | 2004-11-17 | |||
| US20040263043A1 | 2004-12-30 | |||
| KR20110061599A | 2011-06-09 |
Attorney, Agent or Firm:
KWAK, Chul Keun (KR)
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