Title:
SPECTROMETRY DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/044979
Kind Code:
A1
Abstract:
According to the present invention, light emitted from a measurement point of an object surface S is integrated into one parallel light flux by an objective lens 15, the integrated parallel light flux is split into a first light flux and a second light flux by a phase shifter 19, and the first light flux and the second light flux are emitted toward a light-receiving surface of a photodetector 21 while having an optical path length difference therebetween. . A light shielding plate 13 is disposed on a surface that is optically conjugated to the object surface with respect to the objective lens 15, and only light passing through a translucent part of the light shielding plate 13 moves toward the objective lens 15. The lateral length of the translucent part of the light shielding plate 13 and an interval between two adjacent translucent parts are set on the basis of the focal length of the objective lens, the distance from the phase shifter 19 to the light-receiving surface of the photodetector 21, the pixel pitch of the photodetector, the length of a pixel, and a predetermined wavelength included in a wavelength range of the light emitted from the measurement point.
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Inventors:
ISHIMARU ICHIRO (JP)
Application Number:
PCT/JP2020/032689
Publication Date:
March 11, 2021
Filing Date:
August 28, 2020
Export Citation:
Assignee:
UNIV KAGAWA NAT UNIV CORP (JP)
International Classes:
G01J3/32; G01J3/453
Domestic Patent References:
| WO2017150062A1 | 2017-09-08 | |||
| WO2017007024A1 | 2017-01-12 | |||
| WO2019240227A1 | 2019-12-19 | |||
| WO2014054708A1 | 2014-04-10 |
Foreign References:
| JP2016142522A | 2016-08-08 | |||
| JP2012058068A | 2012-03-22 | |||
| JP2016142522A | 2016-08-08 |
Other References:
WEI QI, YO SUZUKI, SHUN SATO, MASARU FUJIWARA, NATSUMI KAWASHIMA, SATORU SUZUKI, PRADEEP ABEYGUNAWARDHANA, KENJI WADA, AKIRA NISHI: "Enhanced interference-pattern visibility using multislit optical superposition method for imaging-type two-dimensional Fourier spectroscopy", APPLIED OPTICS, vol. 54, no. 20, 10 July 2015 (2015-07-10), pages 6254 - 6259, XP055801264
NATSUMI KAWASHIMA, TOMOYA KITAZAKI, KOSUKE NOGO, ICHIRO ISHIMARU: "High-sensitivity mid-infrared one-shot Fourier spectrometer with multi-slit by interferogram superimposition method", PROCEEDINGS OF THE 2020 JSPE AUTUMN CONFERENCE, JAPAN SOCIETY FOR PRECISION ENGINEERING; SEPTEMBER 1-7, 2020, 20 August 2020 (2020-08-20) - 7 September 2020 (2020-09-07), pages 332 - 333, XP009535473, DOI: 10.11522/pscjspe.2020A.0_332
See also references of EP 4027121A4
NATSUMI KAWASHIMA, TOMOYA KITAZAKI, KOSUKE NOGO, ICHIRO ISHIMARU: "High-sensitivity mid-infrared one-shot Fourier spectrometer with multi-slit by interferogram superimposition method", PROCEEDINGS OF THE 2020 JSPE AUTUMN CONFERENCE, JAPAN SOCIETY FOR PRECISION ENGINEERING; SEPTEMBER 1-7, 2020, 20 August 2020 (2020-08-20) - 7 September 2020 (2020-09-07), pages 332 - 333, XP009535473, DOI: 10.11522/pscjspe.2020A.0_332
See also references of EP 4027121A4
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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