Title:
SOLID MATERIAL REMAINING AMOUNT MEASUREMENT METHOD, SUBLIMATED GAS SUPPLY METHOD, AND SUBLIMATED GAS SUPPLY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/140219
Kind Code:
A1
Abstract:
Provided is a measurement method capable of suppressing a loss in the remaining amount of a solid material in a solid material container when supplying a sublimated gas of the solid material to a subsequent process. This method includes: a first remaining amount calculation step in which, when replenishing a buffer tank with the sublimated gas, a remaining amount of the solid material is calculated from a consumption amount of the sublimated gas to be transferred from the buffer tank to the subsequent process; a second remaining amount calculation step in which a remaining amount of the solid material is calculated from an amount of the sublimated gas to be transferred from the solid material container to the buffer tank; and/or a switching determination step in which switching timing and the presence of an abnormality are determined from the remaining amount of the solid material in the solid material container.
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Inventors:
GOTO MIKIO (JP)
NAKAGAWA TOSHIYUKI (JP)
IDA KENTARO (JP)
NAKAGAWA TOSHIYUKI (JP)
IDA KENTARO (JP)
Application Number:
PCT/JP2023/000987
Publication Date:
July 27, 2023
Filing Date:
January 16, 2023
Export Citation:
Assignee:
AIR LIQUIDE (FR)
AIR LIQUIDE JAPAN G K (JP)
AIR LIQUIDE JAPAN G K (JP)
International Classes:
C23C16/448; B01J4/00; B01J7/00; H01L21/205
Foreign References:
| JP2021042445A | 2021-03-18 | |||
| JP2017066511A | 2017-04-06 | |||
| JP2020149180A | 2020-09-17 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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