Title:
SOLID MATERIAL CONTAINER, SOLID MATERIAL SUPPLY DEVICE, AND SOLID MATERIAL SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2024/009845
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a solid material container with which it is possible to ascertain the remaining amount of solid material in the container in a standard state. Provided is a solid material container (11) comprising: a bottomed cylindrical container body (11A) having a barrel part (14), the center axis C of which extends in the vertical direction; a lid (11B) that closes off the top surface, i.e., the opening of the container body (11A); and a plurality of thermocouples (15), wherein the thermocouples (15) are inserted in the horizontal direction from outside to inside in the circumferential direction of the barrel part (14), tips (15a) of the thermocouples (15) are positioned at the center of the barrel part (14), and the plurality of thermocouples (15) are respectively disposed at two or more different heights with gaps therebetween in the vertical direction of the barrel part (14).
Inventors:
MUKAI YOSUKE (JP)
KAMEOKA TAKASHI (JP)
WATANABE RYOMA (JP)
KAGAWA SOTA (JP)
KAMEOKA TAKASHI (JP)
WATANABE RYOMA (JP)
KAGAWA SOTA (JP)
Application Number:
PCT/JP2023/023795
Publication Date:
January 11, 2024
Filing Date:
June 27, 2023
Export Citation:
Assignee:
TAIYO NIPPON SANSO CORP (JP)
International Classes:
C23C16/448; B01J4/00; B01J7/00; F17C7/00; H01L21/205
Domestic Patent References:
| WO2017187866A1 | 2017-11-02 | |||
| WO2005010230A1 | 2005-02-03 | |||
| WO2016075892A1 | 2016-05-19 |
Foreign References:
| JP2008538158A | 2008-10-09 | |||
| JP2001247969A | 2001-09-14 | |||
| JP2022136704A | 2022-09-21 |
Attorney, Agent or Firm:
SHIGA INTERNATIONAL PATENT OFFICE (JP)
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