Title:
SINTERING EQUIPMENT AND ATMOSPHERE CONTROLLABLE PRESSURE-ASSISTED SINTERING MECHANISM THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/137961
Kind Code:
A1
Abstract:
The present invention relates to the technical field of sintering equipment, and in particular to sintering equipment and an atmosphere controllable pressure-assisted sintering mechanism therefor. The atmosphere controllable pressure-assisted sintering mechanism comprises an extendable tube, pressurizing assemblies, and a heating assembly; at least a part of the extendable tube is a bellows section that can be elastically extended and contracted; the extendable tube is arranged between the two pressurizing assemblies. As the extendable tube comprises a bellows section that can be elastically extended and contracted, the elastic modulus of the extendable tube is very low. For a first pressure working range, the extendable tube can be sealed by means of small pressure to form a sintering cavity. Moreover, under the effect of the elastic extension and contraction characteristics of the extendable tube, the pressure on the extendable tube is much smaller than the pressure on the product. Therefore, it can be approximately considered that all pressure of the pressurizing assemblies is applied on the product. Thus, only the pressure of the pressurizing assemblies needs to be measured, the pressure applied on a chip can be known conveniently, sintering bonding in a full-pressure working range can be satisfied, and the application range is wide.
Inventors:
YANG YOUZHI (CN)
ZOU GUISHENG (CN)
QI GUOQIANG (CN)
LIU LEI (CN)
LIU YUAN (CN)
WANG WENGAN (CN)
XU JIANLEI (CN)
WANG SHUAIQI (CN)
PAN BING (CN)
HUANG CHENXIAO (CN)
WU YONGCHAO (CN)
DU RONGBAO (CN)
ZOU GUISHENG (CN)
QI GUOQIANG (CN)
LIU LEI (CN)
LIU YUAN (CN)
WANG WENGAN (CN)
XU JIANLEI (CN)
WANG SHUAIQI (CN)
PAN BING (CN)
HUANG CHENXIAO (CN)
WU YONGCHAO (CN)
DU RONGBAO (CN)
Application Number:
PCT/CN2022/099299
Publication Date:
July 27, 2023
Filing Date:
June 17, 2022
Export Citation:
Assignee:
QUICK INTELLIGENT EQUIP CO LTD (CN)
UNIV TSINGHUA (CN)
UNIV TSINGHUA (CN)
International Classes:
F27B5/06; F27B5/05
Foreign References:
| CN114608311A | 2022-06-10 | |||
| CN201373664Y | 2009-12-30 | |||
| CN2398038Y | 2000-09-27 | |||
| CN106796898A | 2017-05-31 | |||
| US20110017808A1 | 2011-01-27 | |||
| CN101786161A | 2010-07-28 |
Attorney, Agent or Firm:
CHANGZHOU INNOVATION PATENT AGENCY (CN)
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