Title:
SERVO VALVE UNIT AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/158352
Kind Code:
A1
Abstract:
A servo valve unit (20) that has: a unit body (10) that has a first end part (61a) and a second end part (61b); a first valve part (20R); a second valve part (20L); a first seal member (22) that opens/closes the first valve part (20R); a second seal member (22) that opens/closes the second valve part (20L); a first drive mechanism that drives the first seal member (22) by means of a first electric pulse (S1); a second drive mechanism that drives the second seal member (22) by means of a second electric pulse (S2); a supply passage (12) that extends between the first end part (61a) and the first valve part (20R); an exhaust passage (13) that extends between the second end part (61b) and the second valve part (20L); a common passage (11) that is connected to the supply passage (12) and the exhaust passage (13) via the first valve part (20R) and the second valve part (20L); and a drive passage (14) that is connected to a pneumatic actuator (40).
Inventors:
KUBO CHIKANARI (JP)
Application Number:
PCT/JP2020/000715
Publication Date:
August 06, 2020
Filing Date:
January 10, 2020
Export Citation:
Assignee:
EISHIN TECH CO LTD (JP)
International Classes:
F15B9/09; F15B9/03
Foreign References:
| JPS60249705A | 1985-12-10 | |||
| US4518011A | 1985-05-21 |
Attorney, Agent or Firm:
INOUE, Mitsuru et al. (JP)
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