SEMICONDUCTOR WAFER INSPECTION DEVICE

WIPO Patent Application WO/2024/043584

A1

A semiconductor wafer inspection device according to the present invention comprises: a chamber bowl having an open top, and having an accommodation space in which a semiconductor wafer is accommodated; a wafer chuck which is arranged in the accommodation space and which supports the semiconductor wafer; a chamber lid that can be coupled to the chamber bowl; and a spray unit which is provided in the chamber lid, and which sprays a vapor phase decomposition material for the semiconductor wafer accommodated in the accommodation space. According to the present invention, since the spray unit is provided in the chamber lid, providing a separate side space for the spray unit is unnecessary, and thus the size of the semiconductor wafer inspection device can be reduced.

WO/2017/142132	MARKING POSITION CORRECTING APPARATUS AND METHOD
JPWO2011004534	Semiconductor defect classification method, semiconductor defect classification device, semiconductor defect classification program
JP2802825	[Title of Invention] An Electrical Measuring Device for Semiconductor Wafers

KIM JUNG-HWAN (KR)
HONG DAE-WON (KR)
KIM TAE-HYUN (KR)
LEE JU-BEOM (KR)
HAN SANG-WOOK (KR)
JUNG SEOK-JUN (KR)
CHO YOUNG-HOON (KR)
PARK BYEONG-KWEON (KR)

PCT/KR2023/011734

February 29, 2024

August 09, 2023

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KOREA ADVANCED INST SCI & TECH (KR)
KIM JUNG HWAN (KR)

H01L21/66; H01L21/67

KR20190067842A	2019-06-17
KR20200090946A	2020-07-29
KR20040055934A	2004-06-30
KR19990066233A	1999-08-16
KR20190065161A	2019-06-11
KR102510761B1	2023-03-16

JANG, Yong-Seok (KR)

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