Title:
SEMICONDUCTOR PROCESS DEVICE AND BEARING APPARATUS THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/134039
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application is a bearing apparatus of a semiconductor process device. The bearing apparatus is arranged in a process chamber and comprises a base, a bearing member and a limiting ring structure, wherein the limiting ring structure is sleeved on the periphery of the base, an air-blowing flow channel and a first flow-uniformizing space are formed between an inner peripheral wall and an outer peripheral wall of the base, and the first flow-uniformizing space communicates with the air-blowing flow channel; the bearing member and the base are overlapped with each other and located below the base, and an air flow channel structure is provided between the bearing member and the base; the air flow channel structure is in communication with the first flow-uniformizing space by means of a connecting flow channel; the air flow channel structure is used for conveying purging gas to the first flow-uniformizing space by means of the connecting flow channel; the first flow-uniformizing space is used for homogenizing the purging gas; and the air-blowing flow channel is used for blowing out the homogenized purging gas, so as to purge a bottom surface and side surfaces of a wafer. In the embodiments of the present application, the influence of edge purging on airflow fields of the bottom surface and the side surfaces of the wafer is consistent, so that the process uniformity and the process yield are significantly improved.
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Inventors:
TIAN XIQIANG (CN)
YE HUA (CN)
CHEN ZHIYONG (CN)
WANG CHONG (CN)
ZHU LEI (CN)
YE HUA (CN)
CHEN ZHIYONG (CN)
WANG CHONG (CN)
ZHU LEI (CN)
Application Number:
PCT/CN2022/086320
Publication Date:
July 20, 2023
Filing Date:
April 12, 2022
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/687; H01L21/67
Foreign References:
| CN102112649A | 2011-06-29 | |||
| US6375748B1 | 2002-04-23 | |||
| CN113308681A | 2021-08-27 | |||
| US5888304A | 1999-03-30 | |||
| US6040011A | 2000-03-21 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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