Title:
SEAL MECHANISM, DRIVE DEVICE FOR SEAL MECHANISM, TRANSPORT DEVICE, AND MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/087925
Kind Code:
A1
Abstract:
Provided are a seal mechanism with high sealing performance, a drive device for a seal mechanism, a transport device, and a manufacturing device. The seal mechanism separates two spaces having different pressure or gases, and includes: a housing; a shaft inserted into the housing; and multiple annular seal members that make contact with a portion of the shaft or with the radially outside surface of a rotary part affixed to the shaft, thereby sealing a gap. Each of the multiple annular seal members include materials of different substances, and is arranged at a different position in the axial direction parallel to the central axis of the shaft.
Inventors:
NAKAMURA TSUYOSHI (JP)
KON HIDEKI (JP)
HIGUCHI HIDEYA (JP)
KON HIDEKI (JP)
HIGUCHI HIDEYA (JP)
Application Number:
PCT/JP2014/082723
Publication Date:
June 18, 2015
Filing Date:
December 10, 2014
Export Citation:
Assignee:
NSK LTD (JP)
International Classes:
F16J15/32; F16C19/04; F16C33/78; F16C35/063; F16C35/07; H01L21/68
Foreign References:
| JP2002228010A | 2002-08-14 | |||
| JP2007146879A | 2007-06-14 | |||
| JP2013204792A | 2013-10-07 | |||
| JPH03125954U | 1991-12-19 | |||
| JP2001099326A | 2001-04-10 | |||
| JP2007009939A | 2007-01-18 |
Other References:
See also references of EP 3088775A4
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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