Title:
ROTATION MECHANISM AND FILM THICKNESS MONITOR INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2016/002122
Kind Code:
A1
Abstract:
The present invention relates to a rotation mechanism which is provided with: a motor (2); an output shaft (3) powered by the motor (2) to rotationally drive a rotationally driven body (7); and a roller bearing (6) fitted over the output shaft (3) to support the output shaft (3), the mechanism being adapted such that a rotation drive body (4) is disposed at the top of the output shaft (3) so that the rotation drive body (4) is coupled to the rotationally driven body (7) via a rotational force transfer means (5); and an outer ring (61) of the roller bearing is fitted into grooves (51a, 51b) provided in a rotational force transfer means (8). This allows the present invention to implement a structure which makes the roller bearing resistant to fatigue and thereby achieve a long service life.
Inventors:
KOTAKA MANABU (JP)
FURUSE HARUKUNI (JP)
MAEDA AKIHIRO (JP)
FURUSE HARUKUNI (JP)
MAEDA AKIHIRO (JP)
Application Number:
PCT/JP2015/002463
Publication Date:
January 07, 2016
Filing Date:
May 15, 2015
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
F16C35/067; F16C19/06
Foreign References:
| JP2004011801A | 2004-01-15 | |||
| JPH11222670A | 1999-08-17 | |||
| JP2006316804A | 2006-11-24 |
Attorney, Agent or Firm:
SEIGA PATENT AND TRADEMARK CORPORATION (JP)
SEIGA Patent and Trademark Corporation (JP)
SEIGA Patent and Trademark Corporation (JP)
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