Title:
ROTARY WAFER EXCHANGE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/123602
Kind Code:
A1
Abstract:
Disclosed is a rotary wafer exchange system; the rotary wafer exchange system comprises a tray assembly and at least one wafer exchange apparatus; said tray assembly comprises a rotary shaft and at least two trays used for holding wafers, and the tray is connected to the rotary shaft and can rotate along with the rotary shaft so as to rotate among different workstations; the wafer exchange apparatus is arranged around the rotary shaft and located under the tray, the wafer exchange apparatus comprises a support bracket and a lifting/lowering mechanism, and the support bracket is connected to the lifting/lowering mechanism to achieve lifting and lowering.
Inventors:
WU XING (CN)
XU ZHENJIE (CN)
CHEN YINGSONG (CN)
WANG TONGQING (CN)
LU XINCHUN (CN)
XU ZHENJIE (CN)
CHEN YINGSONG (CN)
WANG TONGQING (CN)
LU XINCHUN (CN)
Application Number:
PCT/CN2022/074443
Publication Date:
July 06, 2023
Filing Date:
January 27, 2022
Export Citation:
Assignee:
HWATSING TECH CO LTD (CN)
International Classes:
H01L21/67; B24B27/00
Foreign References:
| CN107791115A | 2018-03-13 | |||
| CN110911326A | 2020-03-24 | |||
| CN109848814A | 2019-06-07 | |||
| CN109909870A | 2019-06-21 | |||
| US20030236056A1 | 2003-12-25 |
Download PDF:
Previous Patent: IMAGE COLOR PROCESSING METHOD AND APPARATUS, AND ELECTRONIC DEVICE
Next Patent: WAFER POST-PROCESSING DEVICE
Next Patent: WAFER POST-PROCESSING DEVICE