Title:
RECOVERY DEVICE USED IN PREPARATION OF ELECTRONIC-GRADE TFT DEVELOPING SOLUTION
Document Type and Number:
WIPO Patent Application WO/2024/060512
Kind Code:
A1
Abstract:
A recovery device used in the preparation of an electronic-grade TFT developing solution, comprising a recovery box (1) and a water tank (2), wherein a filtering box (3) is mounted on the upper end face of the recovery box (1), and an inner wall automatic cleaning mechanism (5) is mounted on the inner wall of the recovery box (1). By cleaning the inner wall, the situation where the inner wall of the recovery box (1) is corroded because stains of a developing solution adhere to the inner wall of the recovery box (1) and cannot be cleaned for a long time is avoided, thereby effectively prolonging the service life of the recovery device.
Inventors:
ZHANG YONGBIAO (CN)
LUO SHUANG (CN)
LUO YONGCHUN (CN)
GUO XIANZHEN (CN)
LIU SHUIXING (CN)
LUO SHUANG (CN)
LUO YONGCHUN (CN)
GUO XIANZHEN (CN)
LIU SHUIXING (CN)
Application Number:
PCT/CN2023/078346
Publication Date:
March 28, 2024
Filing Date:
February 27, 2023
Export Citation:
Assignee:
FUJIAN TIANFU ELECTRONIC MAT CO LTD (CN)
International Classes:
B08B9/032; B01D29/03; B01D29/62; B08B9/087; B08B13/00
Foreign References:
| CN115591873A | 2023-01-13 | |||
| CN206147259U | 2017-05-03 | |||
| CN112755618A | 2021-05-07 | |||
| CN209668805U | 2019-11-22 | |||
| CN211676490U | 2020-10-16 | |||
| DE4442712C1 | 1996-03-14 | |||
| JP2014091079A | 2014-05-19 |
Attorney, Agent or Firm:
BEIJING HENGTAI MINGRUI INTELLECTUAL PROPERTY ACT FOR LIMITED COMPANY (CN)
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