REAL-TIME PRESSURE DEVIATION DETECTION SYSTEM FOR MAGNETIC FLUID VACUUM SEAL

WIPO Patent Application WO/2023/211042

A1

The present invention relates to a real-time pressure deviation detection system for a magnetic fluid vacuum seal. The system comprises: a magnetic fluid vacuum seal which includes a housing accommodating a rotating shaft for transmitting power from an atmospheric side to a vacuum side, a pair of pole pieces surrounding the rotating shaft from an inner space of the housing, a permanent magnet surrounding the rotating shaft from between the pole pieces, and a magnetic fluid confined between the rotating shaft and the pole pieces by the magnetic force of the permanent magnet; a pressure deviation detection sensor which is installed in the housing so as to communicate with the space between the pole pieces and detects changes in pressure on the atmospheric side and the vacuum side; and a control unit which receives the state of the pressure changes detected by the pressure deviation detection sensor. Therefore, the system has the effect of making it possible to quickly take follow-up measures by accurately identifying where pressure deviations have occurred in real time.

CHO JUNG HO (KR)
KIM HAN SOL (KR)
LEE GEON HO (KR)
HAN SANG WOO (KR)
SHIN SEUNG CHEOL (KR)
YOO HO JIN (KR)
JEON JONG HO (KR)
HAN SANG JUN (KR)
LEE HYUN SEUNG (KR)
TAK WOO HYUN (KR)

PCT/KR2023/005275

November 02, 2023

April 19, 2023

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NAT UNIV CHUNGBUK IND ACAD COOP FOUND (KR)

F16J15/43; G01L13/02

KR101095762B1	2011-12-21
US20100230901A1	2010-09-16
JP2010065714A	2010-03-25
KR101608595B1	2016-04-04
JP6553812B2	2019-07-31

KIM, Jeong Hyeon (KR)

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